3/24/2011	8:29:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/24/2011	8:29:40 AM	Recipe started at 8:29 AM
3/24/2011	8:29:40 AM	H2 valve closed
3/24/2011	8:29:40 AM	BCl3 valve closed
3/24/2011	8:29:40 AM	PH3 valve closed
3/24/2011	8:29:40 AM	SiCl4 pre valve closed
3/24/2011	8:29:40 AM	SiCl4 post valve closed
3/24/2011	8:29:40 AM	Main Vac valve closed
3/24/2011	8:29:40 AM	Bypass valve closed
3/24/2011	8:29:40 AM	Bubbler valve closed
3/24/2011	8:29:40 AM	Helium valve opened
3/24/2011	8:29:40 AM	Helium MFC set to  500.000000
3/24/2011	8:29:40 AM	H2 MFC set to  0.000000
3/24/2011	8:29:40 AM	BCl3 MFC set to  0.000000
3/24/2011	8:29:40 AM	PHl3 MFC set to  0.000000
3/24/2011	8:29:40 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:29:40 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:29:40 AM	Tube furnace set to 0
3/24/2011	8:31:00 AM	Helium valve closed
3/24/2011	8:31:00 AM	H2 valve closed
3/24/2011	8:31:00 AM	BCl3 valve closed
3/24/2011	8:31:00 AM	PH3 valve closed
3/24/2011	8:31:00 AM	SiCl4 pre valve closed
3/24/2011	8:31:00 AM	SiCl4 post valve closed
3/24/2011	8:31:00 AM	Main Vac valve closed
3/24/2011	8:31:00 AM	Bypass valve closed
3/24/2011	8:31:00 AM	Bubbler valve closed
3/24/2011	8:31:00 AM	Helium MFC set to  0.000000
3/24/2011	8:31:00 AM	H2 MFC set to  0.000000
3/24/2011	8:31:00 AM	BCl3 MFC set to  0.000000
3/24/2011	8:31:00 AM	PHl3 MFC set to  0.000000
3/24/2011	8:31:00 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:31:00 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:31:00 AM	Tube furnace set to 0
3/24/2011	8:31:00 AM	Run finished at 8:31 AM
3/24/2011	8:31:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/24/2011	8:36:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	8:36:40 AM	Recipe started at 8:36 AM
3/24/2011	8:36:40 AM	Helium valve closed
3/24/2011	8:36:40 AM	H2 valve closed
3/24/2011	8:36:40 AM	BCl3 valve closed
3/24/2011	8:36:40 AM	PH3 valve closed
3/24/2011	8:36:40 AM	SiCl4 pre valve closed
3/24/2011	8:36:40 AM	SiCl4 post valve closed
3/24/2011	8:36:40 AM	Main Vac valve closed
3/24/2011	8:36:40 AM	Bubbler valve closed
3/24/2011	8:36:40 AM	Bypass valve opened
3/24/2011	8:36:40 AM	Helium MFC set to  0.000000
3/24/2011	8:36:40 AM	H2 MFC set to  0.000000
3/24/2011	8:36:40 AM	BCl3 MFC set to  0.000000
3/24/2011	8:36:40 AM	PHl3 MFC set to  0.000000
3/24/2011	8:36:40 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:36:40 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:36:40 AM	Tube furnace set to 0
3/24/2011	8:37:11 AM	Helium valve closed
3/24/2011	8:37:11 AM	H2 valve closed
3/24/2011	8:37:11 AM	BCl3 valve closed
3/24/2011	8:37:11 AM	PH3 valve closed
3/24/2011	8:37:11 AM	SiCl4 pre valve closed
3/24/2011	8:37:11 AM	SiCl4 post valve closed
3/24/2011	8:37:11 AM	Bubbler valve closed
3/24/2011	8:37:11 AM	Main Vac valve opened
3/24/2011	8:37:11 AM	Bypass valve opened
3/24/2011	8:37:11 AM	Helium MFC set to  0.000000
3/24/2011	8:37:11 AM	H2 MFC set to  0.000000
3/24/2011	8:37:11 AM	BCl3 MFC set to  0.000000
3/24/2011	8:37:11 AM	PHl3 MFC set to  0.000000
3/24/2011	8:37:11 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:37:11 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:37:12 AM	Tube furnace set to 0
3/24/2011	8:38:12 AM	H2 valve closed
3/24/2011	8:38:12 AM	BCl3 valve closed
3/24/2011	8:38:12 AM	PH3 valve closed
3/24/2011	8:38:12 AM	SiCl4 pre valve closed
3/24/2011	8:38:12 AM	SiCl4 post valve closed
3/24/2011	8:38:12 AM	Bubbler valve closed
3/24/2011	8:38:12 AM	Helium valve opened
3/24/2011	8:38:12 AM	Main Vac valve opened
3/24/2011	8:38:12 AM	Bypass valve opened
3/24/2011	8:38:12 AM	Helium MFC set to  100.000000
3/24/2011	8:38:12 AM	H2 MFC set to  0.000000
3/24/2011	8:38:12 AM	BCl3 MFC set to  0.000000
3/24/2011	8:38:12 AM	PHl3 MFC set to  0.000000
3/24/2011	8:38:12 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:38:12 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:38:12 AM	Tube furnace set to 0
3/24/2011	8:39:12 AM	Helium valve closed
3/24/2011	8:39:12 AM	H2 valve closed
3/24/2011	8:39:12 AM	BCl3 valve closed
3/24/2011	8:39:12 AM	PH3 valve closed
3/24/2011	8:39:12 AM	SiCl4 pre valve closed
3/24/2011	8:39:12 AM	SiCl4 post valve closed
3/24/2011	8:39:12 AM	Bubbler valve closed
3/24/2011	8:39:12 AM	Main Vac valve opened
3/24/2011	8:39:12 AM	Bypass valve opened
3/24/2011	8:39:12 AM	Helium MFC set to  0.000000
3/24/2011	8:39:12 AM	H2 MFC set to  0.000000
3/24/2011	8:39:12 AM	BCl3 MFC set to  0.000000
3/24/2011	8:39:12 AM	PHl3 MFC set to  0.000000
3/24/2011	8:39:12 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:39:12 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:39:12 AM	Tube furnace set to 0
3/24/2011	8:40:12 AM	H2 valve closed
3/24/2011	8:40:12 AM	BCl3 valve closed
3/24/2011	8:40:12 AM	PH3 valve closed
3/24/2011	8:40:12 AM	SiCl4 pre valve closed
3/24/2011	8:40:12 AM	SiCl4 post valve closed
3/24/2011	8:40:12 AM	Bubbler valve closed
3/24/2011	8:40:12 AM	Helium valve opened
3/24/2011	8:40:12 AM	Main Vac valve opened
3/24/2011	8:40:12 AM	Bypass valve opened
3/24/2011	8:40:12 AM	Helium MFC set to  100.000000
3/24/2011	8:40:12 AM	H2 MFC set to  0.000000
3/24/2011	8:40:12 AM	BCl3 MFC set to  0.000000
3/24/2011	8:40:12 AM	PHl3 MFC set to  0.000000
3/24/2011	8:40:12 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:40:12 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:40:12 AM	Tube furnace set to 0
3/24/2011	8:41:12 AM	Helium valve closed
3/24/2011	8:41:12 AM	H2 valve closed
3/24/2011	8:41:12 AM	BCl3 valve closed
3/24/2011	8:41:12 AM	PH3 valve closed
3/24/2011	8:41:12 AM	SiCl4 pre valve closed
3/24/2011	8:41:12 AM	SiCl4 post valve closed
3/24/2011	8:41:12 AM	Bubbler valve closed
3/24/2011	8:41:12 AM	Main Vac valve opened
3/24/2011	8:41:12 AM	Bypass valve opened
3/24/2011	8:41:12 AM	Helium MFC set to  0.000000
3/24/2011	8:41:12 AM	H2 MFC set to  0.000000
3/24/2011	8:41:12 AM	BCl3 MFC set to  0.000000
3/24/2011	8:41:12 AM	PHl3 MFC set to  0.000000
3/24/2011	8:41:12 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:41:12 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:41:12 AM	Tube furnace set to 0
3/24/2011	8:42:12 AM	H2 valve closed
3/24/2011	8:42:12 AM	BCl3 valve closed
3/24/2011	8:42:12 AM	PH3 valve closed
3/24/2011	8:42:12 AM	SiCl4 pre valve closed
3/24/2011	8:42:12 AM	SiCl4 post valve closed
3/24/2011	8:42:12 AM	Bubbler valve closed
3/24/2011	8:42:12 AM	Helium valve opened
3/24/2011	8:42:12 AM	Main Vac valve opened
3/24/2011	8:42:12 AM	Bypass valve opened
3/24/2011	8:42:12 AM	Helium MFC set to  100.000000
3/24/2011	8:42:12 AM	H2 MFC set to  0.000000
3/24/2011	8:42:12 AM	BCl3 MFC set to  0.000000
3/24/2011	8:42:12 AM	PHl3 MFC set to  0.000000
3/24/2011	8:42:12 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:42:12 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:42:13 AM	Tube furnace set to 0
3/24/2011	8:43:13 AM	Helium valve closed
3/24/2011	8:43:13 AM	H2 valve closed
3/24/2011	8:43:13 AM	BCl3 valve closed
3/24/2011	8:43:13 AM	PH3 valve closed
3/24/2011	8:43:13 AM	SiCl4 pre valve closed
3/24/2011	8:43:13 AM	SiCl4 post valve closed
3/24/2011	8:43:13 AM	Bubbler valve closed
3/24/2011	8:43:13 AM	Main Vac valve opened
3/24/2011	8:43:13 AM	Bypass valve opened
3/24/2011	8:43:13 AM	Helium MFC set to  0.000000
3/24/2011	8:43:13 AM	H2 MFC set to  0.000000
3/24/2011	8:43:13 AM	BCl3 MFC set to  0.000000
3/24/2011	8:43:13 AM	PHl3 MFC set to  0.000000
3/24/2011	8:43:13 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:43:13 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:43:13 AM	Tube furnace set to 0
3/24/2011	8:44:13 AM	H2 valve closed
3/24/2011	8:44:13 AM	BCl3 valve closed
3/24/2011	8:44:13 AM	PH3 valve closed
3/24/2011	8:44:13 AM	SiCl4 pre valve closed
3/24/2011	8:44:13 AM	SiCl4 post valve closed
3/24/2011	8:44:13 AM	Bubbler valve closed
3/24/2011	8:44:13 AM	Helium valve opened
3/24/2011	8:44:13 AM	Main Vac valve opened
3/24/2011	8:44:13 AM	Bypass valve opened
3/24/2011	8:44:13 AM	Helium MFC set to  100.000000
3/24/2011	8:44:13 AM	H2 MFC set to  0.000000
3/24/2011	8:44:13 AM	BCl3 MFC set to  0.000000
3/24/2011	8:44:13 AM	PHl3 MFC set to  0.000000
3/24/2011	8:44:13 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:44:13 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:44:13 AM	Tube furnace set to 0
3/24/2011	8:45:13 AM	Helium valve closed
3/24/2011	8:45:13 AM	H2 valve closed
3/24/2011	8:45:13 AM	BCl3 valve closed
3/24/2011	8:45:13 AM	PH3 valve closed
3/24/2011	8:45:13 AM	SiCl4 pre valve closed
3/24/2011	8:45:13 AM	SiCl4 post valve closed
3/24/2011	8:45:13 AM	Bubbler valve closed
3/24/2011	8:45:13 AM	Main Vac valve opened
3/24/2011	8:45:13 AM	Bypass valve opened
3/24/2011	8:45:13 AM	Helium MFC set to  0.000000
3/24/2011	8:45:13 AM	H2 MFC set to  0.000000
3/24/2011	8:45:13 AM	BCl3 MFC set to  0.000000
3/24/2011	8:45:13 AM	PHl3 MFC set to  0.000000
3/24/2011	8:45:13 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:45:13 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:45:13 AM	Tube furnace set to 0
3/24/2011	8:46:13 AM	H2 valve closed
3/24/2011	8:46:13 AM	BCl3 valve closed
3/24/2011	8:46:13 AM	PH3 valve closed
3/24/2011	8:46:13 AM	SiCl4 pre valve closed
3/24/2011	8:46:13 AM	SiCl4 post valve closed
3/24/2011	8:46:13 AM	Bubbler valve closed
3/24/2011	8:46:13 AM	Helium valve opened
3/24/2011	8:46:13 AM	Main Vac valve opened
3/24/2011	8:46:13 AM	Bypass valve opened
3/24/2011	8:46:13 AM	Helium MFC set to  100.000000
3/24/2011	8:46:13 AM	H2 MFC set to  0.000000
3/24/2011	8:46:13 AM	BCl3 MFC set to  0.000000
3/24/2011	8:46:13 AM	PHl3 MFC set to  0.000000
3/24/2011	8:46:13 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:46:13 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:46:13 AM	Tube furnace set to 0
3/24/2011	8:47:13 AM	Helium valve closed
3/24/2011	8:47:13 AM	H2 valve closed
3/24/2011	8:47:13 AM	BCl3 valve closed
3/24/2011	8:47:13 AM	PH3 valve closed
3/24/2011	8:47:13 AM	SiCl4 pre valve closed
3/24/2011	8:47:13 AM	SiCl4 post valve closed
3/24/2011	8:47:13 AM	Bubbler valve closed
3/24/2011	8:47:13 AM	Main Vac valve opened
3/24/2011	8:47:13 AM	Bypass valve opened
3/24/2011	8:47:13 AM	Helium MFC set to  0.000000
3/24/2011	8:47:13 AM	H2 MFC set to  0.000000
3/24/2011	8:47:13 AM	BCl3 MFC set to  0.000000
3/24/2011	8:47:13 AM	PHl3 MFC set to  0.000000
3/24/2011	8:47:13 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:47:13 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:47:14 AM	Tube furnace set to 0
3/24/2011	8:48:14 AM	H2 valve closed
3/24/2011	8:48:14 AM	BCl3 valve closed
3/24/2011	8:48:14 AM	PH3 valve closed
3/24/2011	8:48:14 AM	SiCl4 pre valve closed
3/24/2011	8:48:14 AM	SiCl4 post valve closed
3/24/2011	8:48:14 AM	Bubbler valve closed
3/24/2011	8:48:14 AM	Helium valve opened
3/24/2011	8:48:14 AM	Main Vac valve opened
3/24/2011	8:48:14 AM	Bypass valve opened
3/24/2011	8:48:14 AM	Helium MFC set to  100.000000
3/24/2011	8:48:14 AM	H2 MFC set to  0.000000
3/24/2011	8:48:14 AM	BCl3 MFC set to  0.000000
3/24/2011	8:48:14 AM	PHl3 MFC set to  0.000000
3/24/2011	8:48:14 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:48:14 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:48:14 AM	Tube furnace set to 0
3/24/2011	8:49:14 AM	Helium valve closed
3/24/2011	8:49:14 AM	H2 valve closed
3/24/2011	8:49:14 AM	BCl3 valve closed
3/24/2011	8:49:14 AM	PH3 valve closed
3/24/2011	8:49:14 AM	SiCl4 pre valve closed
3/24/2011	8:49:14 AM	SiCl4 post valve closed
3/24/2011	8:49:14 AM	Bubbler valve closed
3/24/2011	8:49:14 AM	Main Vac valve opened
3/24/2011	8:49:14 AM	Bypass valve opened
3/24/2011	8:49:14 AM	Helium MFC set to  0.000000
3/24/2011	8:49:14 AM	H2 MFC set to  0.000000
3/24/2011	8:49:14 AM	BCl3 MFC set to  0.000000
3/24/2011	8:49:14 AM	PHl3 MFC set to  0.000000
3/24/2011	8:49:14 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:49:14 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:49:14 AM	Tube furnace set to 0
3/24/2011	8:50:14 AM	H2 valve closed
3/24/2011	8:50:14 AM	BCl3 valve closed
3/24/2011	8:50:14 AM	PH3 valve closed
3/24/2011	8:50:14 AM	SiCl4 pre valve closed
3/24/2011	8:50:14 AM	SiCl4 post valve closed
3/24/2011	8:50:14 AM	Bubbler valve closed
3/24/2011	8:50:14 AM	Helium valve opened
3/24/2011	8:50:14 AM	Main Vac valve opened
3/24/2011	8:50:14 AM	Bypass valve opened
3/24/2011	8:50:14 AM	Helium MFC set to  100.000000
3/24/2011	8:50:14 AM	H2 MFC set to  0.000000
3/24/2011	8:50:14 AM	BCl3 MFC set to  0.000000
3/24/2011	8:50:14 AM	PHl3 MFC set to  0.000000
3/24/2011	8:50:14 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:50:14 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:50:14 AM	Tube furnace set to 0
3/24/2011	8:51:14 AM	Helium valve closed
3/24/2011	8:51:14 AM	H2 valve closed
3/24/2011	8:51:14 AM	BCl3 valve closed
3/24/2011	8:51:14 AM	PH3 valve closed
3/24/2011	8:51:14 AM	SiCl4 pre valve closed
3/24/2011	8:51:14 AM	SiCl4 post valve closed
3/24/2011	8:51:14 AM	Bubbler valve closed
3/24/2011	8:51:14 AM	Main Vac valve opened
3/24/2011	8:51:14 AM	Bypass valve opened
3/24/2011	8:51:14 AM	Helium MFC set to  0.000000
3/24/2011	8:51:14 AM	H2 MFC set to  0.000000
3/24/2011	8:51:14 AM	BCl3 MFC set to  0.000000
3/24/2011	8:51:14 AM	PHl3 MFC set to  0.000000
3/24/2011	8:51:14 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:51:14 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:51:14 AM	Tube furnace set to 0
3/24/2011	8:52:14 AM	H2 valve closed
3/24/2011	8:52:14 AM	BCl3 valve closed
3/24/2011	8:52:14 AM	PH3 valve closed
3/24/2011	8:52:14 AM	SiCl4 pre valve closed
3/24/2011	8:52:14 AM	SiCl4 post valve closed
3/24/2011	8:52:14 AM	Bubbler valve closed
3/24/2011	8:52:14 AM	Helium valve opened
3/24/2011	8:52:14 AM	Main Vac valve opened
3/24/2011	8:52:14 AM	Bypass valve opened
3/24/2011	8:52:14 AM	Helium MFC set to  100.000000
3/24/2011	8:52:14 AM	H2 MFC set to  0.000000
3/24/2011	8:52:14 AM	BCl3 MFC set to  0.000000
3/24/2011	8:52:14 AM	PHl3 MFC set to  0.000000
3/24/2011	8:52:14 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:52:14 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:52:15 AM	Tube furnace set to 0
3/24/2011	8:53:15 AM	Helium valve closed
3/24/2011	8:53:15 AM	H2 valve closed
3/24/2011	8:53:15 AM	BCl3 valve closed
3/24/2011	8:53:15 AM	PH3 valve closed
3/24/2011	8:53:15 AM	SiCl4 pre valve closed
3/24/2011	8:53:15 AM	SiCl4 post valve closed
3/24/2011	8:53:15 AM	Bubbler valve closed
3/24/2011	8:53:15 AM	Main Vac valve opened
3/24/2011	8:53:15 AM	Bypass valve opened
3/24/2011	8:53:15 AM	Helium MFC set to  0.000000
3/24/2011	8:53:15 AM	H2 MFC set to  0.000000
3/24/2011	8:53:15 AM	BCl3 MFC set to  0.000000
3/24/2011	8:53:15 AM	PHl3 MFC set to  0.000000
3/24/2011	8:53:15 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:53:15 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:53:15 AM	Tube furnace set to 0
3/24/2011	8:54:15 AM	H2 valve closed
3/24/2011	8:54:15 AM	BCl3 valve closed
3/24/2011	8:54:15 AM	PH3 valve closed
3/24/2011	8:54:15 AM	SiCl4 pre valve closed
3/24/2011	8:54:15 AM	SiCl4 post valve closed
3/24/2011	8:54:15 AM	Bubbler valve closed
3/24/2011	8:54:15 AM	Helium valve opened
3/24/2011	8:54:15 AM	Main Vac valve opened
3/24/2011	8:54:15 AM	Bypass valve opened
3/24/2011	8:54:15 AM	Helium MFC set to  100.000000
3/24/2011	8:54:15 AM	H2 MFC set to  0.000000
3/24/2011	8:54:15 AM	BCl3 MFC set to  0.000000
3/24/2011	8:54:15 AM	PHl3 MFC set to  0.000000
3/24/2011	8:54:15 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:54:15 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:54:15 AM	Tube furnace set to 0
3/24/2011	8:55:15 AM	Helium valve closed
3/24/2011	8:55:15 AM	H2 valve closed
3/24/2011	8:55:15 AM	BCl3 valve closed
3/24/2011	8:55:15 AM	PH3 valve closed
3/24/2011	8:55:15 AM	SiCl4 pre valve closed
3/24/2011	8:55:15 AM	SiCl4 post valve closed
3/24/2011	8:55:15 AM	Bubbler valve closed
3/24/2011	8:55:15 AM	Main Vac valve opened
3/24/2011	8:55:15 AM	Bypass valve opened
3/24/2011	8:55:15 AM	Helium MFC set to  0.000000
3/24/2011	8:55:15 AM	H2 MFC set to  0.000000
3/24/2011	8:55:15 AM	BCl3 MFC set to  0.000000
3/24/2011	8:55:15 AM	PHl3 MFC set to  0.000000
3/24/2011	8:55:15 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:55:15 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:55:15 AM	Tube furnace set to 0
3/24/2011	8:56:15 AM	H2 valve closed
3/24/2011	8:56:15 AM	BCl3 valve closed
3/24/2011	8:56:15 AM	PH3 valve closed
3/24/2011	8:56:15 AM	SiCl4 pre valve closed
3/24/2011	8:56:15 AM	SiCl4 post valve closed
3/24/2011	8:56:15 AM	Bubbler valve closed
3/24/2011	8:56:15 AM	Helium valve opened
3/24/2011	8:56:15 AM	Main Vac valve opened
3/24/2011	8:56:15 AM	Bypass valve opened
3/24/2011	8:56:15 AM	Helium MFC set to  100.000000
3/24/2011	8:56:15 AM	H2 MFC set to  0.000000
3/24/2011	8:56:15 AM	BCl3 MFC set to  0.000000
3/24/2011	8:56:15 AM	PHl3 MFC set to  0.000000
3/24/2011	8:56:15 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:56:15 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:56:15 AM	Tube furnace set to 0
3/24/2011	8:57:15 AM	Helium valve closed
3/24/2011	8:57:15 AM	H2 valve closed
3/24/2011	8:57:15 AM	BCl3 valve closed
3/24/2011	8:57:15 AM	PH3 valve closed
3/24/2011	8:57:15 AM	SiCl4 pre valve closed
3/24/2011	8:57:15 AM	SiCl4 post valve closed
3/24/2011	8:57:15 AM	Bubbler valve closed
3/24/2011	8:57:15 AM	Main Vac valve opened
3/24/2011	8:57:15 AM	Bypass valve opened
3/24/2011	8:57:15 AM	Helium MFC set to  0.000000
3/24/2011	8:57:15 AM	H2 MFC set to  0.000000
3/24/2011	8:57:15 AM	BCl3 MFC set to  0.000000
3/24/2011	8:57:15 AM	PHl3 MFC set to  0.000000
3/24/2011	8:57:15 AM	SiCl4 MFC set to  0.000000
3/24/2011	8:57:15 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:57:16 AM	Tube furnace set to 0
3/24/2011	8:57:17 AM	Run finished at 8:57 AM
3/24/2011	8:57:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	9:27:46 AM	Main Vac valve closed
3/24/2011	9:28:04 AM	Main Vac valve opened
3/24/2011	9:28:30 AM	Recipe started at 9:28 AM
3/24/2011	9:28:30 AM	Helium valve closed
3/24/2011	9:28:30 AM	BCl3 valve closed
3/24/2011	9:28:30 AM	PH3 valve closed
3/24/2011	9:28:30 AM	SiCl4 pre valve closed
3/24/2011	9:28:30 AM	SiCl4 post valve closed
3/24/2011	9:28:30 AM	Main Vac valve closed
3/24/2011	9:28:30 AM	Bypass valve closed
3/24/2011	9:28:30 AM	Bubbler valve closed
3/24/2011	9:28:30 AM	H2 valve opened
3/24/2011	9:28:30 AM	Helium MFC set to  0.000000
3/24/2011	9:28:30 AM	H2 MFC set to  500.000000
3/24/2011	9:28:30 AM	BCl3 MFC set to  0.000000
3/24/2011	9:28:30 AM	PHl3 MFC set to  0.000000
3/24/2011	9:28:30 AM	SiCl4 MFC set to  0.000000
3/24/2011	9:28:30 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	9:28:30 AM	Tube furnace set to 0
3/24/2011	9:29:53 AM	Helium valve closed
3/24/2011	9:29:53 AM	BCl3 valve closed
3/24/2011	9:29:53 AM	PH3 valve closed
3/24/2011	9:29:53 AM	SiCl4 pre valve closed
3/24/2011	9:29:53 AM	SiCl4 post valve closed
3/24/2011	9:29:53 AM	Main Vac valve closed
3/24/2011	9:29:53 AM	Bypass valve closed
3/24/2011	9:29:53 AM	H2 valve opened
3/24/2011	9:29:53 AM	Bubbler valve opened
3/24/2011	9:29:53 AM	Helium MFC set to  0.000000
3/24/2011	9:29:53 AM	H2 MFC set to  500.000000
3/24/2011	9:29:53 AM	BCl3 MFC set to  0.000000
3/24/2011	9:29:53 AM	PHl3 MFC set to  0.000000
3/24/2011	9:29:53 AM	SiCl4 MFC set to  0.000000
3/24/2011	9:29:53 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	9:29:54 AM	Tube furnace set to 1000
3/24/2011	9:49:54 AM	Helium valve closed
3/24/2011	9:49:54 AM	PH3 valve closed
3/24/2011	9:49:54 AM	Main Vac valve closed
3/24/2011	9:49:54 AM	Bypass valve closed
3/24/2011	9:49:54 AM	H2 valve opened
3/24/2011	9:49:54 AM	BCl3 valve opened
3/24/2011	9:49:54 AM	SiCl4 pre valve opened
3/24/2011	9:49:54 AM	SiCl4 post valve opened
3/24/2011	9:49:54 AM	Bubbler valve opened
3/24/2011	9:49:54 AM	Helium MFC set to  0.000000
3/24/2011	9:49:54 AM	H2 MFC set to  500.000000
3/24/2011	9:49:54 AM	BCl3 MFC set to  3.000000
3/24/2011	9:49:54 AM	PHl3 MFC set to  0.000000
3/24/2011	9:49:54 AM	SiCl4 MFC set to  50.000000
3/24/2011	9:49:54 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	9:49:54 AM	Tube furnace set to 1000
3/24/2011	10:09:54 AM	H2 valve closed
3/24/2011	10:09:54 AM	BCl3 valve closed
3/24/2011	10:09:54 AM	PH3 valve closed
3/24/2011	10:09:54 AM	SiCl4 pre valve closed
3/24/2011	10:09:54 AM	SiCl4 post valve closed
3/24/2011	10:09:54 AM	Main Vac valve closed
3/24/2011	10:09:54 AM	Bypass valve closed
3/24/2011	10:09:54 AM	Helium valve opened
3/24/2011	10:09:54 AM	Bubbler valve opened
3/24/2011	10:09:54 AM	Helium MFC set to  500.000000
3/24/2011	10:09:54 AM	H2 MFC set to  0.000000
3/24/2011	10:09:54 AM	BCl3 MFC set to  0.000000
3/24/2011	10:09:54 AM	PHl3 MFC set to  0.000000
3/24/2011	10:09:54 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:09:54 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:09:54 AM	Tube furnace set to 0
3/24/2011	10:29:54 AM	Helium valve closed
3/24/2011	10:29:54 AM	H2 valve closed
3/24/2011	10:29:54 AM	BCl3 valve closed
3/24/2011	10:29:54 AM	PH3 valve closed
3/24/2011	10:29:54 AM	SiCl4 pre valve closed
3/24/2011	10:29:54 AM	SiCl4 post valve closed
3/24/2011	10:29:54 AM	Main Vac valve closed
3/24/2011	10:29:54 AM	Bypass valve closed
3/24/2011	10:29:54 AM	Bubbler valve closed
3/24/2011	10:29:54 AM	Helium MFC set to  0.000000
3/24/2011	10:29:54 AM	H2 MFC set to  0.000000
3/24/2011	10:29:54 AM	BCl3 MFC set to  0.000000
3/24/2011	10:29:54 AM	PHl3 MFC set to  0.000000
3/24/2011	10:29:54 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:29:54 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:29:54 AM	Tube furnace set to 0
3/24/2011	10:29:54 AM	Run finished at 10:29 AM
3/24/2011	10:41:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/24/2011	10:41:23 AM	Recipe started at 10:41 AM
3/24/2011	10:41:23 AM	H2 valve closed
3/24/2011	10:41:23 AM	BCl3 valve closed
3/24/2011	10:41:23 AM	PH3 valve closed
3/24/2011	10:41:23 AM	SiCl4 pre valve closed
3/24/2011	10:41:23 AM	SiCl4 post valve closed
3/24/2011	10:41:23 AM	Main Vac valve closed
3/24/2011	10:41:23 AM	Bypass valve closed
3/24/2011	10:41:23 AM	Bubbler valve closed
3/24/2011	10:41:23 AM	Helium valve opened
3/24/2011	10:41:23 AM	Helium MFC set to  500.000000
3/24/2011	10:41:23 AM	H2 MFC set to  0.000000
3/24/2011	10:41:23 AM	BCl3 MFC set to  0.000000
3/24/2011	10:41:23 AM	PHl3 MFC set to  0.000000
3/24/2011	10:41:23 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:41:23 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:41:23 AM	Tube furnace set to 0
3/24/2011	10:41:23 AM	Helium valve closed
3/24/2011	10:41:23 AM	H2 valve closed
3/24/2011	10:41:23 AM	BCl3 valve closed
3/24/2011	10:41:23 AM	PH3 valve closed
3/24/2011	10:41:23 AM	SiCl4 pre valve closed
3/24/2011	10:41:23 AM	SiCl4 post valve closed
3/24/2011	10:41:23 AM	Main Vac valve closed
3/24/2011	10:41:23 AM	Bypass valve closed
3/24/2011	10:41:23 AM	Bubbler valve closed
3/24/2011	10:41:23 AM	Helium MFC set to  0.000000
3/24/2011	10:41:23 AM	H2 MFC set to  0.000000
3/24/2011	10:41:23 AM	BCl3 MFC set to  0.000000
3/24/2011	10:41:23 AM	PHl3 MFC set to  0.000000
3/24/2011	10:41:23 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:41:23 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:41:23 AM	Tube furnace set to 0
3/24/2011	10:41:24 AM	Run finished at 10:41 AM
3/24/2011	10:41:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/24/2011	10:44:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	10:45:02 AM	Recipe started at 10:44 AM
3/24/2011	10:45:02 AM	Helium valve closed
3/24/2011	10:45:02 AM	H2 valve closed
3/24/2011	10:45:02 AM	BCl3 valve closed
3/24/2011	10:45:02 AM	PH3 valve closed
3/24/2011	10:45:02 AM	SiCl4 pre valve closed
3/24/2011	10:45:02 AM	SiCl4 post valve closed
3/24/2011	10:45:02 AM	Main Vac valve closed
3/24/2011	10:45:02 AM	Bubbler valve closed
3/24/2011	10:45:02 AM	Bypass valve opened
3/24/2011	10:45:02 AM	Helium MFC set to  0.000000
3/24/2011	10:45:02 AM	H2 MFC set to  0.000000
3/24/2011	10:45:02 AM	BCl3 MFC set to  0.000000
3/24/2011	10:45:02 AM	PHl3 MFC set to  0.000000
3/24/2011	10:45:02 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:45:02 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:45:02 AM	Tube furnace set to 0
3/24/2011	10:45:34 AM	Helium valve closed
3/24/2011	10:45:34 AM	H2 valve closed
3/24/2011	10:45:34 AM	BCl3 valve closed
3/24/2011	10:45:34 AM	PH3 valve closed
3/24/2011	10:45:34 AM	SiCl4 pre valve closed
3/24/2011	10:45:34 AM	SiCl4 post valve closed
3/24/2011	10:45:34 AM	Bubbler valve closed
3/24/2011	10:45:34 AM	Main Vac valve opened
3/24/2011	10:45:34 AM	Bypass valve opened
3/24/2011	10:45:34 AM	Helium MFC set to  0.000000
3/24/2011	10:45:34 AM	H2 MFC set to  0.000000
3/24/2011	10:45:34 AM	BCl3 MFC set to  0.000000
3/24/2011	10:45:34 AM	PHl3 MFC set to  0.000000
3/24/2011	10:45:34 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:45:34 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:45:34 AM	Tube furnace set to 0
3/24/2011	10:46:35 AM	H2 valve closed
3/24/2011	10:46:35 AM	BCl3 valve closed
3/24/2011	10:46:35 AM	PH3 valve closed
3/24/2011	10:46:35 AM	SiCl4 pre valve closed
3/24/2011	10:46:35 AM	SiCl4 post valve closed
3/24/2011	10:46:35 AM	Bubbler valve closed
3/24/2011	10:46:35 AM	Helium valve opened
3/24/2011	10:46:35 AM	Main Vac valve opened
3/24/2011	10:46:35 AM	Bypass valve opened
3/24/2011	10:46:35 AM	Helium MFC set to  100.000000
3/24/2011	10:46:35 AM	H2 MFC set to  0.000000
3/24/2011	10:46:35 AM	BCl3 MFC set to  0.000000
3/24/2011	10:46:35 AM	PHl3 MFC set to  0.000000
3/24/2011	10:46:35 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:46:35 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:46:35 AM	Tube furnace set to 0
3/24/2011	10:47:35 AM	Helium valve closed
3/24/2011	10:47:35 AM	H2 valve closed
3/24/2011	10:47:35 AM	BCl3 valve closed
3/24/2011	10:47:35 AM	PH3 valve closed
3/24/2011	10:47:35 AM	SiCl4 pre valve closed
3/24/2011	10:47:35 AM	SiCl4 post valve closed
3/24/2011	10:47:35 AM	Bubbler valve closed
3/24/2011	10:47:35 AM	Main Vac valve opened
3/24/2011	10:47:35 AM	Bypass valve opened
3/24/2011	10:47:35 AM	Helium MFC set to  0.000000
3/24/2011	10:47:35 AM	H2 MFC set to  0.000000
3/24/2011	10:47:35 AM	BCl3 MFC set to  0.000000
3/24/2011	10:47:35 AM	PHl3 MFC set to  0.000000
3/24/2011	10:47:35 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:47:35 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:47:35 AM	Tube furnace set to 0
3/24/2011	10:48:35 AM	H2 valve closed
3/24/2011	10:48:35 AM	BCl3 valve closed
3/24/2011	10:48:35 AM	PH3 valve closed
3/24/2011	10:48:35 AM	SiCl4 pre valve closed
3/24/2011	10:48:35 AM	SiCl4 post valve closed
3/24/2011	10:48:35 AM	Bubbler valve closed
3/24/2011	10:48:35 AM	Helium valve opened
3/24/2011	10:48:35 AM	Main Vac valve opened
3/24/2011	10:48:35 AM	Bypass valve opened
3/24/2011	10:48:35 AM	Helium MFC set to  100.000000
3/24/2011	10:48:35 AM	H2 MFC set to  0.000000
3/24/2011	10:48:35 AM	BCl3 MFC set to  0.000000
3/24/2011	10:48:35 AM	PHl3 MFC set to  0.000000
3/24/2011	10:48:35 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:48:35 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:48:35 AM	Tube furnace set to 0
3/24/2011	10:49:35 AM	Helium valve closed
3/24/2011	10:49:35 AM	H2 valve closed
3/24/2011	10:49:35 AM	BCl3 valve closed
3/24/2011	10:49:35 AM	PH3 valve closed
3/24/2011	10:49:35 AM	SiCl4 pre valve closed
3/24/2011	10:49:35 AM	SiCl4 post valve closed
3/24/2011	10:49:35 AM	Bubbler valve closed
3/24/2011	10:49:35 AM	Main Vac valve opened
3/24/2011	10:49:35 AM	Bypass valve opened
3/24/2011	10:49:35 AM	Helium MFC set to  0.000000
3/24/2011	10:49:35 AM	H2 MFC set to  0.000000
3/24/2011	10:49:35 AM	BCl3 MFC set to  0.000000
3/24/2011	10:49:35 AM	PHl3 MFC set to  0.000000
3/24/2011	10:49:35 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:49:35 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:49:35 AM	Tube furnace set to 0
3/24/2011	10:50:35 AM	H2 valve closed
3/24/2011	10:50:35 AM	BCl3 valve closed
3/24/2011	10:50:35 AM	PH3 valve closed
3/24/2011	10:50:35 AM	SiCl4 pre valve closed
3/24/2011	10:50:35 AM	SiCl4 post valve closed
3/24/2011	10:50:35 AM	Bubbler valve closed
3/24/2011	10:50:35 AM	Helium valve opened
3/24/2011	10:50:35 AM	Main Vac valve opened
3/24/2011	10:50:35 AM	Bypass valve opened
3/24/2011	10:50:35 AM	Helium MFC set to  100.000000
3/24/2011	10:50:35 AM	H2 MFC set to  0.000000
3/24/2011	10:50:35 AM	BCl3 MFC set to  0.000000
3/24/2011	10:50:35 AM	PHl3 MFC set to  0.000000
3/24/2011	10:50:35 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:50:35 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:50:35 AM	Tube furnace set to 0
3/24/2011	10:51:35 AM	Helium valve closed
3/24/2011	10:51:35 AM	H2 valve closed
3/24/2011	10:51:35 AM	BCl3 valve closed
3/24/2011	10:51:36 AM	PH3 valve closed
3/24/2011	10:51:36 AM	SiCl4 pre valve closed
3/24/2011	10:51:36 AM	SiCl4 post valve closed
3/24/2011	10:51:36 AM	Bubbler valve closed
3/24/2011	10:51:36 AM	Main Vac valve opened
3/24/2011	10:51:36 AM	Bypass valve opened
3/24/2011	10:51:36 AM	Helium MFC set to  0.000000
3/24/2011	10:51:36 AM	H2 MFC set to  0.000000
3/24/2011	10:51:36 AM	BCl3 MFC set to  0.000000
3/24/2011	10:51:36 AM	PHl3 MFC set to  0.000000
3/24/2011	10:51:36 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:51:36 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:51:36 AM	Tube furnace set to 0
3/24/2011	10:52:36 AM	H2 valve closed
3/24/2011	10:52:36 AM	BCl3 valve closed
3/24/2011	10:52:36 AM	PH3 valve closed
3/24/2011	10:52:36 AM	SiCl4 pre valve closed
3/24/2011	10:52:36 AM	SiCl4 post valve closed
3/24/2011	10:52:36 AM	Bubbler valve closed
3/24/2011	10:52:36 AM	Helium valve opened
3/24/2011	10:52:36 AM	Main Vac valve opened
3/24/2011	10:52:36 AM	Bypass valve opened
3/24/2011	10:52:36 AM	Helium MFC set to  100.000000
3/24/2011	10:52:36 AM	H2 MFC set to  0.000000
3/24/2011	10:52:36 AM	BCl3 MFC set to  0.000000
3/24/2011	10:52:36 AM	PHl3 MFC set to  0.000000
3/24/2011	10:52:36 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:52:36 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:52:36 AM	Tube furnace set to 0
3/24/2011	10:53:36 AM	Helium valve closed
3/24/2011	10:53:36 AM	H2 valve closed
3/24/2011	10:53:36 AM	BCl3 valve closed
3/24/2011	10:53:36 AM	PH3 valve closed
3/24/2011	10:53:36 AM	SiCl4 pre valve closed
3/24/2011	10:53:36 AM	SiCl4 post valve closed
3/24/2011	10:53:36 AM	Bubbler valve closed
3/24/2011	10:53:36 AM	Main Vac valve opened
3/24/2011	10:53:36 AM	Bypass valve opened
3/24/2011	10:53:36 AM	Helium MFC set to  0.000000
3/24/2011	10:53:36 AM	H2 MFC set to  0.000000
3/24/2011	10:53:36 AM	BCl3 MFC set to  0.000000
3/24/2011	10:53:36 AM	PHl3 MFC set to  0.000000
3/24/2011	10:53:36 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:53:36 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:53:36 AM	Tube furnace set to 0
3/24/2011	10:54:36 AM	H2 valve closed
3/24/2011	10:54:36 AM	BCl3 valve closed
3/24/2011	10:54:36 AM	PH3 valve closed
3/24/2011	10:54:36 AM	SiCl4 pre valve closed
3/24/2011	10:54:36 AM	SiCl4 post valve closed
3/24/2011	10:54:36 AM	Bubbler valve closed
3/24/2011	10:54:36 AM	Helium valve opened
3/24/2011	10:54:36 AM	Main Vac valve opened
3/24/2011	10:54:36 AM	Bypass valve opened
3/24/2011	10:54:36 AM	Helium MFC set to  100.000000
3/24/2011	10:54:36 AM	H2 MFC set to  0.000000
3/24/2011	10:54:36 AM	BCl3 MFC set to  0.000000
3/24/2011	10:54:36 AM	PHl3 MFC set to  0.000000
3/24/2011	10:54:36 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:54:36 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:54:36 AM	Tube furnace set to 0
3/24/2011	10:55:36 AM	Helium valve closed
3/24/2011	10:55:36 AM	H2 valve closed
3/24/2011	10:55:36 AM	BCl3 valve closed
3/24/2011	10:55:36 AM	PH3 valve closed
3/24/2011	10:55:36 AM	SiCl4 pre valve closed
3/24/2011	10:55:36 AM	SiCl4 post valve closed
3/24/2011	10:55:36 AM	Bubbler valve closed
3/24/2011	10:55:36 AM	Main Vac valve opened
3/24/2011	10:55:36 AM	Bypass valve opened
3/24/2011	10:55:36 AM	Helium MFC set to  0.000000
3/24/2011	10:55:36 AM	H2 MFC set to  0.000000
3/24/2011	10:55:36 AM	BCl3 MFC set to  0.000000
3/24/2011	10:55:36 AM	PHl3 MFC set to  0.000000
3/24/2011	10:55:36 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:55:36 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:55:36 AM	Tube furnace set to 0
3/24/2011	10:56:36 AM	H2 valve closed
3/24/2011	10:56:36 AM	BCl3 valve closed
3/24/2011	10:56:36 AM	PH3 valve closed
3/24/2011	10:56:36 AM	SiCl4 pre valve closed
3/24/2011	10:56:36 AM	SiCl4 post valve closed
3/24/2011	10:56:36 AM	Bubbler valve closed
3/24/2011	10:56:36 AM	Helium valve opened
3/24/2011	10:56:36 AM	Main Vac valve opened
3/24/2011	10:56:36 AM	Bypass valve opened
3/24/2011	10:56:36 AM	Helium MFC set to  100.000000
3/24/2011	10:56:36 AM	H2 MFC set to  0.000000
3/24/2011	10:56:36 AM	BCl3 MFC set to  0.000000
3/24/2011	10:56:36 AM	PHl3 MFC set to  0.000000
3/24/2011	10:56:36 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:56:36 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:56:37 AM	Tube furnace set to 0
3/24/2011	10:57:37 AM	Helium valve closed
3/24/2011	10:57:37 AM	H2 valve closed
3/24/2011	10:57:37 AM	BCl3 valve closed
3/24/2011	10:57:37 AM	PH3 valve closed
3/24/2011	10:57:37 AM	SiCl4 pre valve closed
3/24/2011	10:57:37 AM	SiCl4 post valve closed
3/24/2011	10:57:37 AM	Bubbler valve closed
3/24/2011	10:57:37 AM	Main Vac valve opened
3/24/2011	10:57:37 AM	Bypass valve opened
3/24/2011	10:57:37 AM	Helium MFC set to  0.000000
3/24/2011	10:57:37 AM	H2 MFC set to  0.000000
3/24/2011	10:57:37 AM	BCl3 MFC set to  0.000000
3/24/2011	10:57:37 AM	PHl3 MFC set to  0.000000
3/24/2011	10:57:37 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:57:37 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:57:37 AM	Tube furnace set to 0
3/24/2011	10:58:37 AM	H2 valve closed
3/24/2011	10:58:37 AM	BCl3 valve closed
3/24/2011	10:58:37 AM	PH3 valve closed
3/24/2011	10:58:37 AM	SiCl4 pre valve closed
3/24/2011	10:58:37 AM	SiCl4 post valve closed
3/24/2011	10:58:37 AM	Bubbler valve closed
3/24/2011	10:58:37 AM	Helium valve opened
3/24/2011	10:58:37 AM	Main Vac valve opened
3/24/2011	10:58:37 AM	Bypass valve opened
3/24/2011	10:58:37 AM	Helium MFC set to  100.000000
3/24/2011	10:58:37 AM	H2 MFC set to  0.000000
3/24/2011	10:58:37 AM	BCl3 MFC set to  0.000000
3/24/2011	10:58:37 AM	PHl3 MFC set to  0.000000
3/24/2011	10:58:37 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:58:37 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:58:37 AM	Tube furnace set to 0
3/24/2011	10:59:37 AM	Helium valve closed
3/24/2011	10:59:37 AM	H2 valve closed
3/24/2011	10:59:37 AM	BCl3 valve closed
3/24/2011	10:59:37 AM	PH3 valve closed
3/24/2011	10:59:37 AM	SiCl4 pre valve closed
3/24/2011	10:59:37 AM	SiCl4 post valve closed
3/24/2011	10:59:37 AM	Bubbler valve closed
3/24/2011	10:59:37 AM	Main Vac valve opened
3/24/2011	10:59:37 AM	Bypass valve opened
3/24/2011	10:59:37 AM	Helium MFC set to  0.000000
3/24/2011	10:59:37 AM	H2 MFC set to  0.000000
3/24/2011	10:59:37 AM	BCl3 MFC set to  0.000000
3/24/2011	10:59:37 AM	PHl3 MFC set to  0.000000
3/24/2011	10:59:37 AM	SiCl4 MFC set to  0.000000
3/24/2011	10:59:37 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	10:59:37 AM	Tube furnace set to 0
3/24/2011	11:00:37 AM	H2 valve closed
3/24/2011	11:00:37 AM	BCl3 valve closed
3/24/2011	11:00:37 AM	PH3 valve closed
3/24/2011	11:00:37 AM	SiCl4 pre valve closed
3/24/2011	11:00:37 AM	SiCl4 post valve closed
3/24/2011	11:00:37 AM	Bubbler valve closed
3/24/2011	11:00:37 AM	Helium valve opened
3/24/2011	11:00:37 AM	Main Vac valve opened
3/24/2011	11:00:37 AM	Bypass valve opened
3/24/2011	11:00:37 AM	Helium MFC set to  100.000000
3/24/2011	11:00:37 AM	H2 MFC set to  0.000000
3/24/2011	11:00:37 AM	BCl3 MFC set to  0.000000
3/24/2011	11:00:37 AM	PHl3 MFC set to  0.000000
3/24/2011	11:00:37 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:00:37 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:00:37 AM	Tube furnace set to 0
3/24/2011	11:01:37 AM	Helium valve closed
3/24/2011	11:01:37 AM	H2 valve closed
3/24/2011	11:01:37 AM	BCl3 valve closed
3/24/2011	11:01:37 AM	PH3 valve closed
3/24/2011	11:01:37 AM	SiCl4 pre valve closed
3/24/2011	11:01:37 AM	SiCl4 post valve closed
3/24/2011	11:01:37 AM	Bubbler valve closed
3/24/2011	11:01:37 AM	Main Vac valve opened
3/24/2011	11:01:37 AM	Bypass valve opened
3/24/2011	11:01:37 AM	Helium MFC set to  0.000000
3/24/2011	11:01:37 AM	H2 MFC set to  0.000000
3/24/2011	11:01:37 AM	BCl3 MFC set to  0.000000
3/24/2011	11:01:37 AM	PHl3 MFC set to  0.000000
3/24/2011	11:01:37 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:01:37 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:01:38 AM	Tube furnace set to 0
3/24/2011	11:02:38 AM	H2 valve closed
3/24/2011	11:02:38 AM	BCl3 valve closed
3/24/2011	11:02:38 AM	PH3 valve closed
3/24/2011	11:02:38 AM	SiCl4 pre valve closed
3/24/2011	11:02:38 AM	SiCl4 post valve closed
3/24/2011	11:02:38 AM	Bubbler valve closed
3/24/2011	11:02:38 AM	Helium valve opened
3/24/2011	11:02:38 AM	Main Vac valve opened
3/24/2011	11:02:38 AM	Bypass valve opened
3/24/2011	11:02:38 AM	Helium MFC set to  100.000000
3/24/2011	11:02:38 AM	H2 MFC set to  0.000000
3/24/2011	11:02:38 AM	BCl3 MFC set to  0.000000
3/24/2011	11:02:38 AM	PHl3 MFC set to  0.000000
3/24/2011	11:02:38 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:02:38 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:02:38 AM	Tube furnace set to 0
3/24/2011	11:03:38 AM	Helium valve closed
3/24/2011	11:03:38 AM	H2 valve closed
3/24/2011	11:03:38 AM	BCl3 valve closed
3/24/2011	11:03:38 AM	PH3 valve closed
3/24/2011	11:03:38 AM	SiCl4 pre valve closed
3/24/2011	11:03:38 AM	SiCl4 post valve closed
3/24/2011	11:03:38 AM	Bubbler valve closed
3/24/2011	11:03:38 AM	Main Vac valve opened
3/24/2011	11:03:38 AM	Bypass valve opened
3/24/2011	11:03:38 AM	Helium MFC set to  0.000000
3/24/2011	11:03:38 AM	H2 MFC set to  0.000000
3/24/2011	11:03:38 AM	BCl3 MFC set to  0.000000
3/24/2011	11:03:38 AM	PHl3 MFC set to  0.000000
3/24/2011	11:03:38 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:03:38 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:03:38 AM	Tube furnace set to 0
3/24/2011	11:04:38 AM	H2 valve closed
3/24/2011	11:04:38 AM	BCl3 valve closed
3/24/2011	11:04:38 AM	PH3 valve closed
3/24/2011	11:04:38 AM	SiCl4 pre valve closed
3/24/2011	11:04:38 AM	SiCl4 post valve closed
3/24/2011	11:04:38 AM	Bubbler valve closed
3/24/2011	11:04:38 AM	Helium valve opened
3/24/2011	11:04:38 AM	Main Vac valve opened
3/24/2011	11:04:38 AM	Bypass valve opened
3/24/2011	11:04:38 AM	Helium MFC set to  100.000000
3/24/2011	11:04:38 AM	H2 MFC set to  0.000000
3/24/2011	11:04:38 AM	BCl3 MFC set to  0.000000
3/24/2011	11:04:38 AM	PHl3 MFC set to  0.000000
3/24/2011	11:04:38 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:04:38 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:04:38 AM	Tube furnace set to 0
3/24/2011	11:05:38 AM	Helium valve closed
3/24/2011	11:05:38 AM	H2 valve closed
3/24/2011	11:05:38 AM	BCl3 valve closed
3/24/2011	11:05:38 AM	PH3 valve closed
3/24/2011	11:05:38 AM	SiCl4 pre valve closed
3/24/2011	11:05:38 AM	SiCl4 post valve closed
3/24/2011	11:05:38 AM	Bubbler valve closed
3/24/2011	11:05:38 AM	Main Vac valve opened
3/24/2011	11:05:38 AM	Bypass valve opened
3/24/2011	11:05:38 AM	Helium MFC set to  0.000000
3/24/2011	11:05:38 AM	H2 MFC set to  0.000000
3/24/2011	11:05:38 AM	BCl3 MFC set to  0.000000
3/24/2011	11:05:38 AM	PHl3 MFC set to  0.000000
3/24/2011	11:05:38 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:05:38 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:05:38 AM	Tube furnace set to 0
3/24/2011	11:05:39 AM	Run finished at 11:05 AM
3/24/2011	11:05:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	11:11:40 AM	Recipe started at 11:11 AM
3/24/2011	11:11:40 AM	Helium valve closed
3/24/2011	11:11:40 AM	BCl3 valve closed
3/24/2011	11:11:40 AM	PH3 valve closed
3/24/2011	11:11:40 AM	SiCl4 pre valve closed
3/24/2011	11:11:40 AM	SiCl4 post valve closed
3/24/2011	11:11:40 AM	Main Vac valve closed
3/24/2011	11:11:40 AM	Bypass valve closed
3/24/2011	11:11:40 AM	Bubbler valve closed
3/24/2011	11:11:40 AM	H2 valve opened
3/24/2011	11:11:40 AM	Helium MFC set to  0.000000
3/24/2011	11:11:40 AM	H2 MFC set to  500.000000
3/24/2011	11:11:40 AM	BCl3 MFC set to  0.000000
3/24/2011	11:11:40 AM	PHl3 MFC set to  0.000000
3/24/2011	11:11:40 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:11:40 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:11:40 AM	Tube furnace set to 0
3/24/2011	11:13:00 AM	Helium valve closed
3/24/2011	11:13:00 AM	BCl3 valve closed
3/24/2011	11:13:00 AM	PH3 valve closed
3/24/2011	11:13:00 AM	SiCl4 pre valve closed
3/24/2011	11:13:00 AM	SiCl4 post valve closed
3/24/2011	11:13:00 AM	Main Vac valve closed
3/24/2011	11:13:00 AM	Bypass valve closed
3/24/2011	11:13:00 AM	H2 valve opened
3/24/2011	11:13:00 AM	Bubbler valve opened
3/24/2011	11:13:00 AM	Helium MFC set to  0.000000
3/24/2011	11:13:00 AM	H2 MFC set to  500.000000
3/24/2011	11:13:00 AM	BCl3 MFC set to  0.000000
3/24/2011	11:13:00 AM	PHl3 MFC set to  0.000000
3/24/2011	11:13:00 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:13:00 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:13:00 AM	Tube furnace set to 1000
3/24/2011	11:33:00 AM	Helium valve closed
3/24/2011	11:33:00 AM	PH3 valve closed
3/24/2011	11:33:00 AM	Main Vac valve closed
3/24/2011	11:33:00 AM	Bypass valve closed
3/24/2011	11:33:00 AM	H2 valve opened
3/24/2011	11:33:00 AM	BCl3 valve opened
3/24/2011	11:33:00 AM	SiCl4 pre valve opened
3/24/2011	11:33:00 AM	SiCl4 post valve opened
3/24/2011	11:33:00 AM	Bubbler valve opened
3/24/2011	11:33:00 AM	Helium MFC set to  0.000000
3/24/2011	11:33:00 AM	H2 MFC set to  500.000000
3/24/2011	11:33:00 AM	BCl3 MFC set to  3.000000
3/24/2011	11:33:00 AM	PHl3 MFC set to  0.000000
3/24/2011	11:33:00 AM	SiCl4 MFC set to  50.000000
3/24/2011	11:33:00 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:33:00 AM	Tube furnace set to 1000
3/24/2011	11:53:00 AM	H2 valve closed
3/24/2011	11:53:00 AM	BCl3 valve closed
3/24/2011	11:53:00 AM	PH3 valve closed
3/24/2011	11:53:00 AM	SiCl4 pre valve closed
3/24/2011	11:53:00 AM	SiCl4 post valve closed
3/24/2011	11:53:00 AM	Main Vac valve closed
3/24/2011	11:53:00 AM	Bypass valve closed
3/24/2011	11:53:00 AM	Helium valve opened
3/24/2011	11:53:00 AM	Bubbler valve opened
3/24/2011	11:53:00 AM	Helium MFC set to  500.000000
3/24/2011	11:53:00 AM	H2 MFC set to  0.000000
3/24/2011	11:53:00 AM	BCl3 MFC set to  0.000000
3/24/2011	11:53:00 AM	PHl3 MFC set to  0.000000
3/24/2011	11:53:00 AM	SiCl4 MFC set to  0.000000
3/24/2011	11:53:00 AM	Bypass solenoid MFC set to  0.000000
3/24/2011	11:53:00 AM	Tube furnace set to 0
3/24/2011	12:13:00 PM	Helium valve closed
3/24/2011	12:13:00 PM	H2 valve closed
3/24/2011	12:13:00 PM	BCl3 valve closed
3/24/2011	12:13:00 PM	PH3 valve closed
3/24/2011	12:13:00 PM	SiCl4 pre valve closed
3/24/2011	12:13:00 PM	SiCl4 post valve closed
3/24/2011	12:13:00 PM	Main Vac valve closed
3/24/2011	12:13:00 PM	Bypass valve closed
3/24/2011	12:13:00 PM	Bubbler valve closed
3/24/2011	12:13:00 PM	Helium MFC set to  0.000000
3/24/2011	12:13:00 PM	H2 MFC set to  0.000000
3/24/2011	12:13:00 PM	BCl3 MFC set to  0.000000
3/24/2011	12:13:00 PM	PHl3 MFC set to  0.000000
3/24/2011	12:13:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:13:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:13:00 PM	Tube furnace set to 0
3/24/2011	12:13:01 PM	Run finished at 12:13 PM
3/24/2011	12:23:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	12:23:26 PM	Recipe started at 12:23 PM
3/24/2011	12:23:26 PM	Helium valve closed
3/24/2011	12:23:26 PM	H2 valve closed
3/24/2011	12:23:26 PM	BCl3 valve closed
3/24/2011	12:23:26 PM	PH3 valve closed
3/24/2011	12:23:26 PM	SiCl4 pre valve closed
3/24/2011	12:23:26 PM	SiCl4 post valve closed
3/24/2011	12:23:26 PM	Main Vac valve closed
3/24/2011	12:23:26 PM	Bubbler valve closed
3/24/2011	12:23:26 PM	Bypass valve opened
3/24/2011	12:23:26 PM	Helium MFC set to  0.000000
3/24/2011	12:23:26 PM	H2 MFC set to  0.000000
3/24/2011	12:23:26 PM	BCl3 MFC set to  0.000000
3/24/2011	12:23:26 PM	PHl3 MFC set to  0.000000
3/24/2011	12:23:26 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:23:26 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:23:26 PM	Tube furnace set to 0
3/24/2011	12:23:59 PM	Helium valve closed
3/24/2011	12:23:59 PM	H2 valve closed
3/24/2011	12:23:59 PM	BCl3 valve closed
3/24/2011	12:23:59 PM	PH3 valve closed
3/24/2011	12:23:59 PM	SiCl4 pre valve closed
3/24/2011	12:23:59 PM	SiCl4 post valve closed
3/24/2011	12:23:59 PM	Bubbler valve closed
3/24/2011	12:23:59 PM	Main Vac valve opened
3/24/2011	12:23:59 PM	Bypass valve opened
3/24/2011	12:23:59 PM	Helium MFC set to  0.000000
3/24/2011	12:23:59 PM	H2 MFC set to  0.000000
3/24/2011	12:23:59 PM	BCl3 MFC set to  0.000000
3/24/2011	12:23:59 PM	PHl3 MFC set to  0.000000
3/24/2011	12:23:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:23:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:23:59 PM	Tube furnace set to 0
3/24/2011	12:24:59 PM	H2 valve closed
3/24/2011	12:24:59 PM	BCl3 valve closed
3/24/2011	12:24:59 PM	PH3 valve closed
3/24/2011	12:24:59 PM	SiCl4 pre valve closed
3/24/2011	12:24:59 PM	SiCl4 post valve closed
3/24/2011	12:24:59 PM	Bubbler valve closed
3/24/2011	12:24:59 PM	Helium valve opened
3/24/2011	12:24:59 PM	Main Vac valve opened
3/24/2011	12:24:59 PM	Bypass valve opened
3/24/2011	12:24:59 PM	Helium MFC set to  100.000000
3/24/2011	12:24:59 PM	H2 MFC set to  0.000000
3/24/2011	12:24:59 PM	BCl3 MFC set to  0.000000
3/24/2011	12:24:59 PM	PHl3 MFC set to  0.000000
3/24/2011	12:24:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:24:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:24:59 PM	Tube furnace set to 0
3/24/2011	12:25:59 PM	Helium valve closed
3/24/2011	12:25:59 PM	H2 valve closed
3/24/2011	12:25:59 PM	BCl3 valve closed
3/24/2011	12:25:59 PM	PH3 valve closed
3/24/2011	12:25:59 PM	SiCl4 pre valve closed
3/24/2011	12:25:59 PM	SiCl4 post valve closed
3/24/2011	12:25:59 PM	Bubbler valve closed
3/24/2011	12:25:59 PM	Main Vac valve opened
3/24/2011	12:25:59 PM	Bypass valve opened
3/24/2011	12:25:59 PM	Helium MFC set to  0.000000
3/24/2011	12:25:59 PM	H2 MFC set to  0.000000
3/24/2011	12:25:59 PM	BCl3 MFC set to  0.000000
3/24/2011	12:25:59 PM	PHl3 MFC set to  0.000000
3/24/2011	12:25:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:25:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:26:00 PM	Tube furnace set to 0
3/24/2011	12:27:00 PM	H2 valve closed
3/24/2011	12:27:00 PM	BCl3 valve closed
3/24/2011	12:27:00 PM	PH3 valve closed
3/24/2011	12:27:00 PM	SiCl4 pre valve closed
3/24/2011	12:27:00 PM	SiCl4 post valve closed
3/24/2011	12:27:00 PM	Bubbler valve closed
3/24/2011	12:27:00 PM	Helium valve opened
3/24/2011	12:27:00 PM	Main Vac valve opened
3/24/2011	12:27:00 PM	Bypass valve opened
3/24/2011	12:27:00 PM	Helium MFC set to  100.000000
3/24/2011	12:27:00 PM	H2 MFC set to  0.000000
3/24/2011	12:27:00 PM	BCl3 MFC set to  0.000000
3/24/2011	12:27:00 PM	PHl3 MFC set to  0.000000
3/24/2011	12:27:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:27:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:27:00 PM	Tube furnace set to 0
3/24/2011	12:28:00 PM	Helium valve closed
3/24/2011	12:28:00 PM	H2 valve closed
3/24/2011	12:28:00 PM	BCl3 valve closed
3/24/2011	12:28:00 PM	PH3 valve closed
3/24/2011	12:28:00 PM	SiCl4 pre valve closed
3/24/2011	12:28:00 PM	SiCl4 post valve closed
3/24/2011	12:28:00 PM	Bubbler valve closed
3/24/2011	12:28:00 PM	Main Vac valve opened
3/24/2011	12:28:00 PM	Bypass valve opened
3/24/2011	12:28:00 PM	Helium MFC set to  0.000000
3/24/2011	12:28:00 PM	H2 MFC set to  0.000000
3/24/2011	12:28:00 PM	BCl3 MFC set to  0.000000
3/24/2011	12:28:00 PM	PHl3 MFC set to  0.000000
3/24/2011	12:28:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:28:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:28:00 PM	Tube furnace set to 0
3/24/2011	12:29:00 PM	H2 valve closed
3/24/2011	12:29:00 PM	BCl3 valve closed
3/24/2011	12:29:00 PM	PH3 valve closed
3/24/2011	12:29:00 PM	SiCl4 pre valve closed
3/24/2011	12:29:00 PM	SiCl4 post valve closed
3/24/2011	12:29:00 PM	Bubbler valve closed
3/24/2011	12:29:00 PM	Helium valve opened
3/24/2011	12:29:00 PM	Main Vac valve opened
3/24/2011	12:29:00 PM	Bypass valve opened
3/24/2011	12:29:00 PM	Helium MFC set to  100.000000
3/24/2011	12:29:00 PM	H2 MFC set to  0.000000
3/24/2011	12:29:00 PM	BCl3 MFC set to  0.000000
3/24/2011	12:29:00 PM	PHl3 MFC set to  0.000000
3/24/2011	12:29:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:29:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:29:00 PM	Tube furnace set to 0
3/24/2011	12:30:00 PM	Helium valve closed
3/24/2011	12:30:00 PM	H2 valve closed
3/24/2011	12:30:00 PM	BCl3 valve closed
3/24/2011	12:30:00 PM	PH3 valve closed
3/24/2011	12:30:00 PM	SiCl4 pre valve closed
3/24/2011	12:30:00 PM	SiCl4 post valve closed
3/24/2011	12:30:00 PM	Bubbler valve closed
3/24/2011	12:30:00 PM	Main Vac valve opened
3/24/2011	12:30:00 PM	Bypass valve opened
3/24/2011	12:30:00 PM	Helium MFC set to  0.000000
3/24/2011	12:30:00 PM	H2 MFC set to  0.000000
3/24/2011	12:30:00 PM	BCl3 MFC set to  0.000000
3/24/2011	12:30:00 PM	PHl3 MFC set to  0.000000
3/24/2011	12:30:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:30:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:30:00 PM	Tube furnace set to 0
3/24/2011	12:31:00 PM	H2 valve closed
3/24/2011	12:31:00 PM	BCl3 valve closed
3/24/2011	12:31:00 PM	PH3 valve closed
3/24/2011	12:31:00 PM	SiCl4 pre valve closed
3/24/2011	12:31:00 PM	SiCl4 post valve closed
3/24/2011	12:31:00 PM	Bubbler valve closed
3/24/2011	12:31:00 PM	Helium valve opened
3/24/2011	12:31:00 PM	Main Vac valve opened
3/24/2011	12:31:00 PM	Bypass valve opened
3/24/2011	12:31:00 PM	Helium MFC set to  100.000000
3/24/2011	12:31:00 PM	H2 MFC set to  0.000000
3/24/2011	12:31:00 PM	BCl3 MFC set to  0.000000
3/24/2011	12:31:00 PM	PHl3 MFC set to  0.000000
3/24/2011	12:31:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:31:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:31:01 PM	Tube furnace set to 0
3/24/2011	12:32:01 PM	Helium valve closed
3/24/2011	12:32:01 PM	H2 valve closed
3/24/2011	12:32:01 PM	BCl3 valve closed
3/24/2011	12:32:01 PM	PH3 valve closed
3/24/2011	12:32:01 PM	SiCl4 pre valve closed
3/24/2011	12:32:01 PM	SiCl4 post valve closed
3/24/2011	12:32:01 PM	Bubbler valve closed
3/24/2011	12:32:01 PM	Main Vac valve opened
3/24/2011	12:32:01 PM	Bypass valve opened
3/24/2011	12:32:01 PM	Helium MFC set to  0.000000
3/24/2011	12:32:01 PM	H2 MFC set to  0.000000
3/24/2011	12:32:01 PM	BCl3 MFC set to  0.000000
3/24/2011	12:32:01 PM	PHl3 MFC set to  0.000000
3/24/2011	12:32:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:32:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:32:01 PM	Tube furnace set to 0
3/24/2011	12:33:01 PM	H2 valve closed
3/24/2011	12:33:01 PM	BCl3 valve closed
3/24/2011	12:33:01 PM	PH3 valve closed
3/24/2011	12:33:01 PM	SiCl4 pre valve closed
3/24/2011	12:33:01 PM	SiCl4 post valve closed
3/24/2011	12:33:01 PM	Bubbler valve closed
3/24/2011	12:33:01 PM	Helium valve opened
3/24/2011	12:33:01 PM	Main Vac valve opened
3/24/2011	12:33:01 PM	Bypass valve opened
3/24/2011	12:33:01 PM	Helium MFC set to  100.000000
3/24/2011	12:33:01 PM	H2 MFC set to  0.000000
3/24/2011	12:33:01 PM	BCl3 MFC set to  0.000000
3/24/2011	12:33:01 PM	PHl3 MFC set to  0.000000
3/24/2011	12:33:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:33:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:33:01 PM	Tube furnace set to 0
3/24/2011	12:34:01 PM	Helium valve closed
3/24/2011	12:34:01 PM	H2 valve closed
3/24/2011	12:34:01 PM	BCl3 valve closed
3/24/2011	12:34:01 PM	PH3 valve closed
3/24/2011	12:34:01 PM	SiCl4 pre valve closed
3/24/2011	12:34:01 PM	SiCl4 post valve closed
3/24/2011	12:34:01 PM	Bubbler valve closed
3/24/2011	12:34:01 PM	Main Vac valve opened
3/24/2011	12:34:01 PM	Bypass valve opened
3/24/2011	12:34:01 PM	Helium MFC set to  0.000000
3/24/2011	12:34:01 PM	H2 MFC set to  0.000000
3/24/2011	12:34:01 PM	BCl3 MFC set to  0.000000
3/24/2011	12:34:01 PM	PHl3 MFC set to  0.000000
3/24/2011	12:34:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:34:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:34:01 PM	Tube furnace set to 0
3/24/2011	12:35:01 PM	H2 valve closed
3/24/2011	12:35:01 PM	BCl3 valve closed
3/24/2011	12:35:01 PM	PH3 valve closed
3/24/2011	12:35:01 PM	SiCl4 pre valve closed
3/24/2011	12:35:01 PM	SiCl4 post valve closed
3/24/2011	12:35:01 PM	Bubbler valve closed
3/24/2011	12:35:01 PM	Helium valve opened
3/24/2011	12:35:01 PM	Main Vac valve opened
3/24/2011	12:35:01 PM	Bypass valve opened
3/24/2011	12:35:01 PM	Helium MFC set to  100.000000
3/24/2011	12:35:01 PM	H2 MFC set to  0.000000
3/24/2011	12:35:01 PM	BCl3 MFC set to  0.000000
3/24/2011	12:35:01 PM	PHl3 MFC set to  0.000000
3/24/2011	12:35:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:35:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:35:01 PM	Tube furnace set to 0
3/24/2011	12:36:01 PM	Helium valve closed
3/24/2011	12:36:01 PM	H2 valve closed
3/24/2011	12:36:01 PM	BCl3 valve closed
3/24/2011	12:36:01 PM	PH3 valve closed
3/24/2011	12:36:01 PM	SiCl4 pre valve closed
3/24/2011	12:36:01 PM	SiCl4 post valve closed
3/24/2011	12:36:01 PM	Bubbler valve closed
3/24/2011	12:36:01 PM	Main Vac valve opened
3/24/2011	12:36:01 PM	Bypass valve opened
3/24/2011	12:36:01 PM	Helium MFC set to  0.000000
3/24/2011	12:36:01 PM	H2 MFC set to  0.000000
3/24/2011	12:36:01 PM	BCl3 MFC set to  0.000000
3/24/2011	12:36:01 PM	PHl3 MFC set to  0.000000
3/24/2011	12:36:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:36:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:36:02 PM	Tube furnace set to 0
3/24/2011	12:37:02 PM	H2 valve closed
3/24/2011	12:37:02 PM	BCl3 valve closed
3/24/2011	12:37:02 PM	PH3 valve closed
3/24/2011	12:37:02 PM	SiCl4 pre valve closed
3/24/2011	12:37:02 PM	SiCl4 post valve closed
3/24/2011	12:37:02 PM	Bubbler valve closed
3/24/2011	12:37:02 PM	Helium valve opened
3/24/2011	12:37:02 PM	Main Vac valve opened
3/24/2011	12:37:02 PM	Bypass valve opened
3/24/2011	12:37:02 PM	Helium MFC set to  100.000000
3/24/2011	12:37:02 PM	H2 MFC set to  0.000000
3/24/2011	12:37:02 PM	BCl3 MFC set to  0.000000
3/24/2011	12:37:02 PM	PHl3 MFC set to  0.000000
3/24/2011	12:37:02 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:37:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:37:02 PM	Tube furnace set to 0
3/24/2011	12:38:02 PM	Helium valve closed
3/24/2011	12:38:02 PM	H2 valve closed
3/24/2011	12:38:02 PM	BCl3 valve closed
3/24/2011	12:38:02 PM	PH3 valve closed
3/24/2011	12:38:02 PM	SiCl4 pre valve closed
3/24/2011	12:38:02 PM	SiCl4 post valve closed
3/24/2011	12:38:02 PM	Bubbler valve closed
3/24/2011	12:38:02 PM	Main Vac valve opened
3/24/2011	12:38:02 PM	Bypass valve opened
3/24/2011	12:38:02 PM	Helium MFC set to  0.000000
3/24/2011	12:38:02 PM	H2 MFC set to  0.000000
3/24/2011	12:38:02 PM	BCl3 MFC set to  0.000000
3/24/2011	12:38:02 PM	PHl3 MFC set to  0.000000
3/24/2011	12:38:02 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:38:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:38:02 PM	Tube furnace set to 0
3/24/2011	12:39:02 PM	H2 valve closed
3/24/2011	12:39:02 PM	BCl3 valve closed
3/24/2011	12:39:02 PM	PH3 valve closed
3/24/2011	12:39:02 PM	SiCl4 pre valve closed
3/24/2011	12:39:02 PM	SiCl4 post valve closed
3/24/2011	12:39:02 PM	Bubbler valve closed
3/24/2011	12:39:02 PM	Helium valve opened
3/24/2011	12:39:02 PM	Main Vac valve opened
3/24/2011	12:39:02 PM	Bypass valve opened
3/24/2011	12:39:02 PM	Helium MFC set to  100.000000
3/24/2011	12:39:02 PM	H2 MFC set to  0.000000
3/24/2011	12:39:02 PM	BCl3 MFC set to  0.000000
3/24/2011	12:39:02 PM	PHl3 MFC set to  0.000000
3/24/2011	12:39:02 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:39:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:39:02 PM	Tube furnace set to 0
3/24/2011	12:40:02 PM	Helium valve closed
3/24/2011	12:40:02 PM	H2 valve closed
3/24/2011	12:40:02 PM	BCl3 valve closed
3/24/2011	12:40:02 PM	PH3 valve closed
3/24/2011	12:40:02 PM	SiCl4 pre valve closed
3/24/2011	12:40:02 PM	SiCl4 post valve closed
3/24/2011	12:40:02 PM	Bubbler valve closed
3/24/2011	12:40:02 PM	Main Vac valve opened
3/24/2011	12:40:02 PM	Bypass valve opened
3/24/2011	12:40:02 PM	Helium MFC set to  0.000000
3/24/2011	12:40:02 PM	H2 MFC set to  0.000000
3/24/2011	12:40:02 PM	BCl3 MFC set to  0.000000
3/24/2011	12:40:02 PM	PHl3 MFC set to  0.000000
3/24/2011	12:40:02 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:40:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:40:02 PM	Tube furnace set to 0
3/24/2011	12:41:02 PM	H2 valve closed
3/24/2011	12:41:02 PM	BCl3 valve closed
3/24/2011	12:41:02 PM	PH3 valve closed
3/24/2011	12:41:02 PM	SiCl4 pre valve closed
3/24/2011	12:41:02 PM	SiCl4 post valve closed
3/24/2011	12:41:02 PM	Bubbler valve closed
3/24/2011	12:41:02 PM	Helium valve opened
3/24/2011	12:41:02 PM	Main Vac valve opened
3/24/2011	12:41:02 PM	Bypass valve opened
3/24/2011	12:41:02 PM	Helium MFC set to  100.000000
3/24/2011	12:41:02 PM	H2 MFC set to  0.000000
3/24/2011	12:41:02 PM	BCl3 MFC set to  0.000000
3/24/2011	12:41:02 PM	PHl3 MFC set to  0.000000
3/24/2011	12:41:02 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:41:02 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:41:02 PM	Tube furnace set to 0
3/24/2011	12:42:03 PM	Helium valve closed
3/24/2011	12:42:03 PM	H2 valve closed
3/24/2011	12:42:03 PM	BCl3 valve closed
3/24/2011	12:42:03 PM	PH3 valve closed
3/24/2011	12:42:03 PM	SiCl4 pre valve closed
3/24/2011	12:42:03 PM	SiCl4 post valve closed
3/24/2011	12:42:03 PM	Bubbler valve closed
3/24/2011	12:42:03 PM	Main Vac valve opened
3/24/2011	12:42:03 PM	Bypass valve opened
3/24/2011	12:42:03 PM	Helium MFC set to  0.000000
3/24/2011	12:42:03 PM	H2 MFC set to  0.000000
3/24/2011	12:42:03 PM	BCl3 MFC set to  0.000000
3/24/2011	12:42:03 PM	PHl3 MFC set to  0.000000
3/24/2011	12:42:03 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:42:03 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:42:03 PM	Tube furnace set to 0
3/24/2011	12:43:03 PM	H2 valve closed
3/24/2011	12:43:03 PM	BCl3 valve closed
3/24/2011	12:43:03 PM	PH3 valve closed
3/24/2011	12:43:03 PM	SiCl4 pre valve closed
3/24/2011	12:43:03 PM	SiCl4 post valve closed
3/24/2011	12:43:03 PM	Bubbler valve closed
3/24/2011	12:43:03 PM	Helium valve opened
3/24/2011	12:43:03 PM	Main Vac valve opened
3/24/2011	12:43:03 PM	Bypass valve opened
3/24/2011	12:43:03 PM	Helium MFC set to  100.000000
3/24/2011	12:43:03 PM	H2 MFC set to  0.000000
3/24/2011	12:43:03 PM	BCl3 MFC set to  0.000000
3/24/2011	12:43:03 PM	PHl3 MFC set to  0.000000
3/24/2011	12:43:03 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:43:03 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:43:03 PM	Tube furnace set to 0
3/24/2011	12:44:03 PM	Helium valve closed
3/24/2011	12:44:03 PM	H2 valve closed
3/24/2011	12:44:03 PM	BCl3 valve closed
3/24/2011	12:44:03 PM	PH3 valve closed
3/24/2011	12:44:03 PM	SiCl4 pre valve closed
3/24/2011	12:44:03 PM	SiCl4 post valve closed
3/24/2011	12:44:03 PM	Bubbler valve closed
3/24/2011	12:44:03 PM	Main Vac valve opened
3/24/2011	12:44:03 PM	Bypass valve opened
3/24/2011	12:44:03 PM	Helium MFC set to  0.000000
3/24/2011	12:44:03 PM	H2 MFC set to  0.000000
3/24/2011	12:44:03 PM	BCl3 MFC set to  0.000000
3/24/2011	12:44:03 PM	PHl3 MFC set to  0.000000
3/24/2011	12:44:03 PM	SiCl4 MFC set to  0.000000
3/24/2011	12:44:03 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	12:44:03 PM	Tube furnace set to 0
3/24/2011	12:44:04 PM	Run finished at 12:44 PM
3/24/2011	12:44:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	1:13:36 PM	Recipe started at 1:13 PM
3/24/2011	1:13:36 PM	Helium valve closed
3/24/2011	1:13:36 PM	BCl3 valve closed
3/24/2011	1:13:36 PM	PH3 valve closed
3/24/2011	1:13:36 PM	SiCl4 pre valve closed
3/24/2011	1:13:36 PM	SiCl4 post valve closed
3/24/2011	1:13:36 PM	Main Vac valve closed
3/24/2011	1:13:36 PM	Bypass valve closed
3/24/2011	1:13:36 PM	Bubbler valve closed
3/24/2011	1:13:36 PM	H2 valve opened
3/24/2011	1:13:36 PM	Helium MFC set to  0.000000
3/24/2011	1:13:36 PM	H2 MFC set to  500.000000
3/24/2011	1:13:36 PM	BCl3 MFC set to  0.000000
3/24/2011	1:13:36 PM	PHl3 MFC set to  0.000000
3/24/2011	1:13:36 PM	SiCl4 MFC set to  0.000000
3/24/2011	1:13:36 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	1:13:36 PM	Tube furnace set to 0
3/24/2011	1:14:55 PM	Helium valve closed
3/24/2011	1:14:55 PM	BCl3 valve closed
3/24/2011	1:14:55 PM	PH3 valve closed
3/24/2011	1:14:55 PM	SiCl4 pre valve closed
3/24/2011	1:14:55 PM	SiCl4 post valve closed
3/24/2011	1:14:55 PM	Main Vac valve closed
3/24/2011	1:14:55 PM	Bypass valve closed
3/24/2011	1:14:55 PM	H2 valve opened
3/24/2011	1:14:55 PM	Bubbler valve opened
3/24/2011	1:14:55 PM	Helium MFC set to  0.000000
3/24/2011	1:14:55 PM	H2 MFC set to  500.000000
3/24/2011	1:14:55 PM	BCl3 MFC set to  0.000000
3/24/2011	1:14:55 PM	PHl3 MFC set to  0.000000
3/24/2011	1:14:55 PM	SiCl4 MFC set to  0.000000
3/24/2011	1:14:55 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	1:14:55 PM	Tube furnace set to 1000
3/24/2011	1:34:55 PM	Helium valve closed
3/24/2011	1:34:55 PM	PH3 valve closed
3/24/2011	1:34:55 PM	Main Vac valve closed
3/24/2011	1:34:55 PM	Bypass valve closed
3/24/2011	1:34:55 PM	H2 valve opened
3/24/2011	1:34:55 PM	BCl3 valve opened
3/24/2011	1:34:55 PM	SiCl4 pre valve opened
3/24/2011	1:34:55 PM	SiCl4 post valve opened
3/24/2011	1:34:55 PM	Bubbler valve opened
3/24/2011	1:34:55 PM	Helium MFC set to  0.000000
3/24/2011	1:34:55 PM	H2 MFC set to  500.000000
3/24/2011	1:34:55 PM	BCl3 MFC set to  3.000000
3/24/2011	1:34:55 PM	PHl3 MFC set to  0.000000
3/24/2011	1:34:55 PM	SiCl4 MFC set to  50.000000
3/24/2011	1:34:55 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	1:34:55 PM	Tube furnace set to 1000
3/24/2011	1:54:55 PM	H2 valve closed
3/24/2011	1:54:55 PM	BCl3 valve closed
3/24/2011	1:54:55 PM	PH3 valve closed
3/24/2011	1:54:55 PM	SiCl4 pre valve closed
3/24/2011	1:54:55 PM	SiCl4 post valve closed
3/24/2011	1:54:55 PM	Main Vac valve closed
3/24/2011	1:54:55 PM	Bypass valve closed
3/24/2011	1:54:55 PM	Helium valve opened
3/24/2011	1:54:55 PM	Bubbler valve opened
3/24/2011	1:54:55 PM	Helium MFC set to  500.000000
3/24/2011	1:54:55 PM	H2 MFC set to  0.000000
3/24/2011	1:54:55 PM	BCl3 MFC set to  0.000000
3/24/2011	1:54:55 PM	PHl3 MFC set to  0.000000
3/24/2011	1:54:55 PM	SiCl4 MFC set to  0.000000
3/24/2011	1:54:55 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	1:54:55 PM	Tube furnace set to 0
3/24/2011	2:14:55 PM	Helium valve closed
3/24/2011	2:14:55 PM	H2 valve closed
3/24/2011	2:14:55 PM	BCl3 valve closed
3/24/2011	2:14:55 PM	PH3 valve closed
3/24/2011	2:14:55 PM	SiCl4 pre valve closed
3/24/2011	2:14:55 PM	SiCl4 post valve closed
3/24/2011	2:14:55 PM	Main Vac valve closed
3/24/2011	2:14:55 PM	Bypass valve closed
3/24/2011	2:14:55 PM	Bubbler valve closed
3/24/2011	2:14:55 PM	Helium MFC set to  0.000000
3/24/2011	2:14:55 PM	H2 MFC set to  0.000000
3/24/2011	2:14:55 PM	BCl3 MFC set to  0.000000
3/24/2011	2:14:55 PM	PHl3 MFC set to  0.000000
3/24/2011	2:14:55 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:14:55 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:14:55 PM	Tube furnace set to 0
3/24/2011	2:14:56 PM	Run finished at 2:14 PM
3/24/2011	2:27:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	2:27:25 PM	Recipe started at 2:27 PM
3/24/2011	2:27:25 PM	Helium valve closed
3/24/2011	2:27:25 PM	H2 valve closed
3/24/2011	2:27:25 PM	BCl3 valve closed
3/24/2011	2:27:25 PM	PH3 valve closed
3/24/2011	2:27:25 PM	SiCl4 pre valve closed
3/24/2011	2:27:25 PM	SiCl4 post valve closed
3/24/2011	2:27:25 PM	Main Vac valve closed
3/24/2011	2:27:25 PM	Bubbler valve closed
3/24/2011	2:27:25 PM	Bypass valve opened
3/24/2011	2:27:25 PM	Helium MFC set to  0.000000
3/24/2011	2:27:25 PM	H2 MFC set to  0.000000
3/24/2011	2:27:25 PM	BCl3 MFC set to  0.000000
3/24/2011	2:27:25 PM	PHl3 MFC set to  0.000000
3/24/2011	2:27:25 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:27:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:27:25 PM	Tube furnace set to 0
3/24/2011	2:27:57 PM	Helium valve closed
3/24/2011	2:27:57 PM	H2 valve closed
3/24/2011	2:27:57 PM	BCl3 valve closed
3/24/2011	2:27:57 PM	PH3 valve closed
3/24/2011	2:27:57 PM	SiCl4 pre valve closed
3/24/2011	2:27:57 PM	SiCl4 post valve closed
3/24/2011	2:27:57 PM	Bubbler valve closed
3/24/2011	2:27:57 PM	Main Vac valve opened
3/24/2011	2:27:57 PM	Bypass valve opened
3/24/2011	2:27:57 PM	Helium MFC set to  0.000000
3/24/2011	2:27:57 PM	H2 MFC set to  0.000000
3/24/2011	2:27:57 PM	BCl3 MFC set to  0.000000
3/24/2011	2:27:57 PM	PHl3 MFC set to  0.000000
3/24/2011	2:27:57 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:27:57 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:27:57 PM	Tube furnace set to 0
3/24/2011	2:28:57 PM	H2 valve closed
3/24/2011	2:28:57 PM	BCl3 valve closed
3/24/2011	2:28:57 PM	PH3 valve closed
3/24/2011	2:28:57 PM	SiCl4 pre valve closed
3/24/2011	2:28:57 PM	SiCl4 post valve closed
3/24/2011	2:28:57 PM	Bubbler valve closed
3/24/2011	2:28:57 PM	Helium valve opened
3/24/2011	2:28:57 PM	Main Vac valve opened
3/24/2011	2:28:57 PM	Bypass valve opened
3/24/2011	2:28:57 PM	Helium MFC set to  100.000000
3/24/2011	2:28:57 PM	H2 MFC set to  0.000000
3/24/2011	2:28:57 PM	BCl3 MFC set to  0.000000
3/24/2011	2:28:57 PM	PHl3 MFC set to  0.000000
3/24/2011	2:28:57 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:28:57 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:28:58 PM	Tube furnace set to 0
3/24/2011	2:29:58 PM	Helium valve closed
3/24/2011	2:29:58 PM	H2 valve closed
3/24/2011	2:29:58 PM	BCl3 valve closed
3/24/2011	2:29:58 PM	PH3 valve closed
3/24/2011	2:29:58 PM	SiCl4 pre valve closed
3/24/2011	2:29:58 PM	SiCl4 post valve closed
3/24/2011	2:29:58 PM	Bubbler valve closed
3/24/2011	2:29:58 PM	Main Vac valve opened
3/24/2011	2:29:58 PM	Bypass valve opened
3/24/2011	2:29:58 PM	Helium MFC set to  0.000000
3/24/2011	2:29:58 PM	H2 MFC set to  0.000000
3/24/2011	2:29:58 PM	BCl3 MFC set to  0.000000
3/24/2011	2:29:58 PM	PHl3 MFC set to  0.000000
3/24/2011	2:29:58 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:29:58 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:29:58 PM	Tube furnace set to 0
3/24/2011	2:30:58 PM	H2 valve closed
3/24/2011	2:30:58 PM	BCl3 valve closed
3/24/2011	2:30:58 PM	PH3 valve closed
3/24/2011	2:30:58 PM	SiCl4 pre valve closed
3/24/2011	2:30:58 PM	SiCl4 post valve closed
3/24/2011	2:30:58 PM	Bubbler valve closed
3/24/2011	2:30:58 PM	Helium valve opened
3/24/2011	2:30:58 PM	Main Vac valve opened
3/24/2011	2:30:58 PM	Bypass valve opened
3/24/2011	2:30:58 PM	Helium MFC set to  100.000000
3/24/2011	2:30:58 PM	H2 MFC set to  0.000000
3/24/2011	2:30:58 PM	BCl3 MFC set to  0.000000
3/24/2011	2:30:58 PM	PHl3 MFC set to  0.000000
3/24/2011	2:30:58 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:30:58 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:30:58 PM	Tube furnace set to 0
3/24/2011	2:31:58 PM	Helium valve closed
3/24/2011	2:31:58 PM	H2 valve closed
3/24/2011	2:31:58 PM	BCl3 valve closed
3/24/2011	2:31:58 PM	PH3 valve closed
3/24/2011	2:31:58 PM	SiCl4 pre valve closed
3/24/2011	2:31:58 PM	SiCl4 post valve closed
3/24/2011	2:31:58 PM	Bubbler valve closed
3/24/2011	2:31:58 PM	Main Vac valve opened
3/24/2011	2:31:58 PM	Bypass valve opened
3/24/2011	2:31:58 PM	Helium MFC set to  0.000000
3/24/2011	2:31:58 PM	H2 MFC set to  0.000000
3/24/2011	2:31:58 PM	BCl3 MFC set to  0.000000
3/24/2011	2:31:58 PM	PHl3 MFC set to  0.000000
3/24/2011	2:31:58 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:31:58 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:31:58 PM	Tube furnace set to 0
3/24/2011	2:32:58 PM	H2 valve closed
3/24/2011	2:32:58 PM	BCl3 valve closed
3/24/2011	2:32:58 PM	PH3 valve closed
3/24/2011	2:32:58 PM	SiCl4 pre valve closed
3/24/2011	2:32:58 PM	SiCl4 post valve closed
3/24/2011	2:32:58 PM	Bubbler valve closed
3/24/2011	2:32:58 PM	Helium valve opened
3/24/2011	2:32:58 PM	Main Vac valve opened
3/24/2011	2:32:58 PM	Bypass valve opened
3/24/2011	2:32:58 PM	Helium MFC set to  100.000000
3/24/2011	2:32:58 PM	H2 MFC set to  0.000000
3/24/2011	2:32:58 PM	BCl3 MFC set to  0.000000
3/24/2011	2:32:58 PM	PHl3 MFC set to  0.000000
3/24/2011	2:32:58 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:32:58 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:32:58 PM	Tube furnace set to 0
3/24/2011	2:33:58 PM	Helium valve closed
3/24/2011	2:33:58 PM	H2 valve closed
3/24/2011	2:33:58 PM	BCl3 valve closed
3/24/2011	2:33:58 PM	PH3 valve closed
3/24/2011	2:33:58 PM	SiCl4 pre valve closed
3/24/2011	2:33:58 PM	SiCl4 post valve closed
3/24/2011	2:33:58 PM	Bubbler valve closed
3/24/2011	2:33:58 PM	Main Vac valve opened
3/24/2011	2:33:58 PM	Bypass valve opened
3/24/2011	2:33:58 PM	Helium MFC set to  0.000000
3/24/2011	2:33:58 PM	H2 MFC set to  0.000000
3/24/2011	2:33:58 PM	BCl3 MFC set to  0.000000
3/24/2011	2:33:58 PM	PHl3 MFC set to  0.000000
3/24/2011	2:33:58 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:33:58 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:33:59 PM	Tube furnace set to 0
3/24/2011	2:34:59 PM	H2 valve closed
3/24/2011	2:34:59 PM	BCl3 valve closed
3/24/2011	2:34:59 PM	PH3 valve closed
3/24/2011	2:34:59 PM	SiCl4 pre valve closed
3/24/2011	2:34:59 PM	SiCl4 post valve closed
3/24/2011	2:34:59 PM	Bubbler valve closed
3/24/2011	2:34:59 PM	Helium valve opened
3/24/2011	2:34:59 PM	Main Vac valve opened
3/24/2011	2:34:59 PM	Bypass valve opened
3/24/2011	2:34:59 PM	Helium MFC set to  100.000000
3/24/2011	2:34:59 PM	H2 MFC set to  0.000000
3/24/2011	2:34:59 PM	BCl3 MFC set to  0.000000
3/24/2011	2:34:59 PM	PHl3 MFC set to  0.000000
3/24/2011	2:34:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:34:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:34:59 PM	Tube furnace set to 0
3/24/2011	2:35:59 PM	Helium valve closed
3/24/2011	2:35:59 PM	H2 valve closed
3/24/2011	2:35:59 PM	BCl3 valve closed
3/24/2011	2:35:59 PM	PH3 valve closed
3/24/2011	2:35:59 PM	SiCl4 pre valve closed
3/24/2011	2:35:59 PM	SiCl4 post valve closed
3/24/2011	2:35:59 PM	Bubbler valve closed
3/24/2011	2:35:59 PM	Main Vac valve opened
3/24/2011	2:35:59 PM	Bypass valve opened
3/24/2011	2:35:59 PM	Helium MFC set to  0.000000
3/24/2011	2:35:59 PM	H2 MFC set to  0.000000
3/24/2011	2:35:59 PM	BCl3 MFC set to  0.000000
3/24/2011	2:35:59 PM	PHl3 MFC set to  0.000000
3/24/2011	2:35:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:35:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:35:59 PM	Tube furnace set to 0
3/24/2011	2:36:59 PM	H2 valve closed
3/24/2011	2:36:59 PM	BCl3 valve closed
3/24/2011	2:36:59 PM	PH3 valve closed
3/24/2011	2:36:59 PM	SiCl4 pre valve closed
3/24/2011	2:36:59 PM	SiCl4 post valve closed
3/24/2011	2:36:59 PM	Bubbler valve closed
3/24/2011	2:36:59 PM	Helium valve opened
3/24/2011	2:36:59 PM	Main Vac valve opened
3/24/2011	2:36:59 PM	Bypass valve opened
3/24/2011	2:36:59 PM	Helium MFC set to  100.000000
3/24/2011	2:36:59 PM	H2 MFC set to  0.000000
3/24/2011	2:36:59 PM	BCl3 MFC set to  0.000000
3/24/2011	2:36:59 PM	PHl3 MFC set to  0.000000
3/24/2011	2:36:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:36:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:36:59 PM	Tube furnace set to 0
3/24/2011	2:37:59 PM	Helium valve closed
3/24/2011	2:37:59 PM	H2 valve closed
3/24/2011	2:37:59 PM	BCl3 valve closed
3/24/2011	2:37:59 PM	PH3 valve closed
3/24/2011	2:37:59 PM	SiCl4 pre valve closed
3/24/2011	2:37:59 PM	SiCl4 post valve closed
3/24/2011	2:37:59 PM	Bubbler valve closed
3/24/2011	2:37:59 PM	Main Vac valve opened
3/24/2011	2:37:59 PM	Bypass valve opened
3/24/2011	2:37:59 PM	Helium MFC set to  0.000000
3/24/2011	2:37:59 PM	H2 MFC set to  0.000000
3/24/2011	2:37:59 PM	BCl3 MFC set to  0.000000
3/24/2011	2:37:59 PM	PHl3 MFC set to  0.000000
3/24/2011	2:37:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:37:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:37:59 PM	Tube furnace set to 0
3/24/2011	2:38:59 PM	H2 valve closed
3/24/2011	2:38:59 PM	BCl3 valve closed
3/24/2011	2:38:59 PM	PH3 valve closed
3/24/2011	2:38:59 PM	SiCl4 pre valve closed
3/24/2011	2:38:59 PM	SiCl4 post valve closed
3/24/2011	2:38:59 PM	Bubbler valve closed
3/24/2011	2:38:59 PM	Helium valve opened
3/24/2011	2:38:59 PM	Main Vac valve opened
3/24/2011	2:38:59 PM	Bypass valve opened
3/24/2011	2:38:59 PM	Helium MFC set to  100.000000
3/24/2011	2:38:59 PM	H2 MFC set to  0.000000
3/24/2011	2:38:59 PM	BCl3 MFC set to  0.000000
3/24/2011	2:38:59 PM	PHl3 MFC set to  0.000000
3/24/2011	2:38:59 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:38:59 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:39:00 PM	Tube furnace set to 0
3/24/2011	2:40:00 PM	Helium valve closed
3/24/2011	2:40:00 PM	H2 valve closed
3/24/2011	2:40:00 PM	BCl3 valve closed
3/24/2011	2:40:00 PM	PH3 valve closed
3/24/2011	2:40:00 PM	SiCl4 pre valve closed
3/24/2011	2:40:00 PM	SiCl4 post valve closed
3/24/2011	2:40:00 PM	Bubbler valve closed
3/24/2011	2:40:00 PM	Main Vac valve opened
3/24/2011	2:40:00 PM	Bypass valve opened
3/24/2011	2:40:00 PM	Helium MFC set to  0.000000
3/24/2011	2:40:00 PM	H2 MFC set to  0.000000
3/24/2011	2:40:00 PM	BCl3 MFC set to  0.000000
3/24/2011	2:40:00 PM	PHl3 MFC set to  0.000000
3/24/2011	2:40:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:40:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:40:00 PM	Tube furnace set to 0
3/24/2011	2:41:00 PM	H2 valve closed
3/24/2011	2:41:00 PM	BCl3 valve closed
3/24/2011	2:41:00 PM	PH3 valve closed
3/24/2011	2:41:00 PM	SiCl4 pre valve closed
3/24/2011	2:41:00 PM	SiCl4 post valve closed
3/24/2011	2:41:00 PM	Bubbler valve closed
3/24/2011	2:41:00 PM	Helium valve opened
3/24/2011	2:41:00 PM	Main Vac valve opened
3/24/2011	2:41:00 PM	Bypass valve opened
3/24/2011	2:41:00 PM	Helium MFC set to  100.000000
3/24/2011	2:41:00 PM	H2 MFC set to  0.000000
3/24/2011	2:41:00 PM	BCl3 MFC set to  0.000000
3/24/2011	2:41:00 PM	PHl3 MFC set to  0.000000
3/24/2011	2:41:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:41:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:41:00 PM	Tube furnace set to 0
3/24/2011	2:42:00 PM	Helium valve closed
3/24/2011	2:42:00 PM	H2 valve closed
3/24/2011	2:42:00 PM	BCl3 valve closed
3/24/2011	2:42:00 PM	PH3 valve closed
3/24/2011	2:42:00 PM	SiCl4 pre valve closed
3/24/2011	2:42:00 PM	SiCl4 post valve closed
3/24/2011	2:42:00 PM	Bubbler valve closed
3/24/2011	2:42:00 PM	Main Vac valve opened
3/24/2011	2:42:00 PM	Bypass valve opened
3/24/2011	2:42:00 PM	Helium MFC set to  0.000000
3/24/2011	2:42:00 PM	H2 MFC set to  0.000000
3/24/2011	2:42:00 PM	BCl3 MFC set to  0.000000
3/24/2011	2:42:00 PM	PHl3 MFC set to  0.000000
3/24/2011	2:42:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:42:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:42:00 PM	Tube furnace set to 0
3/24/2011	2:43:00 PM	H2 valve closed
3/24/2011	2:43:00 PM	BCl3 valve closed
3/24/2011	2:43:00 PM	PH3 valve closed
3/24/2011	2:43:00 PM	SiCl4 pre valve closed
3/24/2011	2:43:00 PM	SiCl4 post valve closed
3/24/2011	2:43:00 PM	Bubbler valve closed
3/24/2011	2:43:00 PM	Helium valve opened
3/24/2011	2:43:00 PM	Main Vac valve opened
3/24/2011	2:43:00 PM	Bypass valve opened
3/24/2011	2:43:00 PM	Helium MFC set to  100.000000
3/24/2011	2:43:00 PM	H2 MFC set to  0.000000
3/24/2011	2:43:00 PM	BCl3 MFC set to  0.000000
3/24/2011	2:43:00 PM	PHl3 MFC set to  0.000000
3/24/2011	2:43:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:43:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:43:00 PM	Tube furnace set to 0
3/24/2011	2:44:00 PM	Helium valve closed
3/24/2011	2:44:00 PM	H2 valve closed
3/24/2011	2:44:00 PM	BCl3 valve closed
3/24/2011	2:44:00 PM	PH3 valve closed
3/24/2011	2:44:00 PM	SiCl4 pre valve closed
3/24/2011	2:44:00 PM	SiCl4 post valve closed
3/24/2011	2:44:00 PM	Bubbler valve closed
3/24/2011	2:44:00 PM	Main Vac valve opened
3/24/2011	2:44:00 PM	Bypass valve opened
3/24/2011	2:44:00 PM	Helium MFC set to  0.000000
3/24/2011	2:44:00 PM	H2 MFC set to  0.000000
3/24/2011	2:44:00 PM	BCl3 MFC set to  0.000000
3/24/2011	2:44:00 PM	PHl3 MFC set to  0.000000
3/24/2011	2:44:00 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:44:00 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:44:01 PM	Tube furnace set to 0
3/24/2011	2:45:01 PM	H2 valve closed
3/24/2011	2:45:01 PM	BCl3 valve closed
3/24/2011	2:45:01 PM	PH3 valve closed
3/24/2011	2:45:01 PM	SiCl4 pre valve closed
3/24/2011	2:45:01 PM	SiCl4 post valve closed
3/24/2011	2:45:01 PM	Bubbler valve closed
3/24/2011	2:45:01 PM	Helium valve opened
3/24/2011	2:45:01 PM	Main Vac valve opened
3/24/2011	2:45:01 PM	Bypass valve opened
3/24/2011	2:45:01 PM	Helium MFC set to  100.000000
3/24/2011	2:45:01 PM	H2 MFC set to  0.000000
3/24/2011	2:45:01 PM	BCl3 MFC set to  0.000000
3/24/2011	2:45:01 PM	PHl3 MFC set to  0.000000
3/24/2011	2:45:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:45:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:45:01 PM	Tube furnace set to 0
3/24/2011	2:46:01 PM	Helium valve closed
3/24/2011	2:46:01 PM	H2 valve closed
3/24/2011	2:46:01 PM	BCl3 valve closed
3/24/2011	2:46:01 PM	PH3 valve closed
3/24/2011	2:46:01 PM	SiCl4 pre valve closed
3/24/2011	2:46:01 PM	SiCl4 post valve closed
3/24/2011	2:46:01 PM	Bubbler valve closed
3/24/2011	2:46:01 PM	Main Vac valve opened
3/24/2011	2:46:01 PM	Bypass valve opened
3/24/2011	2:46:01 PM	Helium MFC set to  0.000000
3/24/2011	2:46:01 PM	H2 MFC set to  0.000000
3/24/2011	2:46:01 PM	BCl3 MFC set to  0.000000
3/24/2011	2:46:01 PM	PHl3 MFC set to  0.000000
3/24/2011	2:46:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:46:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:46:01 PM	Tube furnace set to 0
3/24/2011	2:47:01 PM	H2 valve closed
3/24/2011	2:47:01 PM	BCl3 valve closed
3/24/2011	2:47:01 PM	PH3 valve closed
3/24/2011	2:47:01 PM	SiCl4 pre valve closed
3/24/2011	2:47:01 PM	SiCl4 post valve closed
3/24/2011	2:47:01 PM	Bubbler valve closed
3/24/2011	2:47:01 PM	Helium valve opened
3/24/2011	2:47:01 PM	Main Vac valve opened
3/24/2011	2:47:01 PM	Bypass valve opened
3/24/2011	2:47:01 PM	Helium MFC set to  100.000000
3/24/2011	2:47:01 PM	H2 MFC set to  0.000000
3/24/2011	2:47:01 PM	BCl3 MFC set to  0.000000
3/24/2011	2:47:01 PM	PHl3 MFC set to  0.000000
3/24/2011	2:47:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:47:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:47:01 PM	Tube furnace set to 0
3/24/2011	2:48:01 PM	Helium valve closed
3/24/2011	2:48:01 PM	H2 valve closed
3/24/2011	2:48:01 PM	BCl3 valve closed
3/24/2011	2:48:01 PM	PH3 valve closed
3/24/2011	2:48:01 PM	SiCl4 pre valve closed
3/24/2011	2:48:01 PM	SiCl4 post valve closed
3/24/2011	2:48:01 PM	Bubbler valve closed
3/24/2011	2:48:01 PM	Main Vac valve opened
3/24/2011	2:48:01 PM	Bypass valve opened
3/24/2011	2:48:01 PM	Helium MFC set to  0.000000
3/24/2011	2:48:01 PM	H2 MFC set to  0.000000
3/24/2011	2:48:01 PM	BCl3 MFC set to  0.000000
3/24/2011	2:48:01 PM	PHl3 MFC set to  0.000000
3/24/2011	2:48:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:48:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:48:01 PM	Tube furnace set to 0
3/24/2011	2:48:02 PM	Run finished at 2:48 PM
3/24/2011	2:48:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	2:51:25 PM	Recipe started at 2:51 PM
3/24/2011	2:51:25 PM	Helium valve closed
3/24/2011	2:51:25 PM	BCl3 valve closed
3/24/2011	2:51:25 PM	PH3 valve closed
3/24/2011	2:51:25 PM	SiCl4 pre valve closed
3/24/2011	2:51:25 PM	SiCl4 post valve closed
3/24/2011	2:51:25 PM	Main Vac valve closed
3/24/2011	2:51:25 PM	Bypass valve closed
3/24/2011	2:51:25 PM	Bubbler valve closed
3/24/2011	2:51:25 PM	H2 valve opened
3/24/2011	2:51:25 PM	Helium MFC set to  0.000000
3/24/2011	2:51:25 PM	H2 MFC set to  500.000000
3/24/2011	2:51:25 PM	BCl3 MFC set to  0.000000
3/24/2011	2:51:25 PM	PHl3 MFC set to  0.000000
3/24/2011	2:51:25 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:51:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:51:25 PM	Tube furnace set to 0
3/24/2011	2:52:43 PM	Helium valve closed
3/24/2011	2:52:43 PM	BCl3 valve closed
3/24/2011	2:52:43 PM	PH3 valve closed
3/24/2011	2:52:43 PM	SiCl4 pre valve closed
3/24/2011	2:52:43 PM	SiCl4 post valve closed
3/24/2011	2:52:43 PM	Main Vac valve closed
3/24/2011	2:52:43 PM	Bypass valve closed
3/24/2011	2:52:43 PM	H2 valve opened
3/24/2011	2:52:43 PM	Bubbler valve opened
3/24/2011	2:52:43 PM	Helium MFC set to  0.000000
3/24/2011	2:52:43 PM	H2 MFC set to  500.000000
3/24/2011	2:52:43 PM	BCl3 MFC set to  0.000000
3/24/2011	2:52:43 PM	PHl3 MFC set to  0.000000
3/24/2011	2:52:43 PM	SiCl4 MFC set to  0.000000
3/24/2011	2:52:43 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	2:52:44 PM	Tube furnace set to 1000
3/24/2011	3:12:44 PM	Helium valve closed
3/24/2011	3:12:44 PM	PH3 valve closed
3/24/2011	3:12:44 PM	Main Vac valve closed
3/24/2011	3:12:44 PM	Bypass valve closed
3/24/2011	3:12:44 PM	H2 valve opened
3/24/2011	3:12:44 PM	BCl3 valve opened
3/24/2011	3:12:44 PM	SiCl4 pre valve opened
3/24/2011	3:12:44 PM	SiCl4 post valve opened
3/24/2011	3:12:44 PM	Bubbler valve opened
3/24/2011	3:12:44 PM	Helium MFC set to  0.000000
3/24/2011	3:12:44 PM	H2 MFC set to  500.000000
3/24/2011	3:12:44 PM	BCl3 MFC set to  3.000000
3/24/2011	3:12:44 PM	PHl3 MFC set to  0.000000
3/24/2011	3:12:44 PM	SiCl4 MFC set to  50.000000
3/24/2011	3:12:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:12:44 PM	Tube furnace set to 1000
3/24/2011	3:32:44 PM	H2 valve closed
3/24/2011	3:32:44 PM	BCl3 valve closed
3/24/2011	3:32:44 PM	PH3 valve closed
3/24/2011	3:32:44 PM	SiCl4 pre valve closed
3/24/2011	3:32:44 PM	SiCl4 post valve closed
3/24/2011	3:32:44 PM	Main Vac valve closed
3/24/2011	3:32:44 PM	Bypass valve closed
3/24/2011	3:32:44 PM	Helium valve opened
3/24/2011	3:32:44 PM	Bubbler valve opened
3/24/2011	3:32:44 PM	Helium MFC set to  500.000000
3/24/2011	3:32:44 PM	H2 MFC set to  0.000000
3/24/2011	3:32:44 PM	BCl3 MFC set to  0.000000
3/24/2011	3:32:44 PM	PHl3 MFC set to  0.000000
3/24/2011	3:32:44 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:32:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:32:44 PM	Tube furnace set to 0
3/24/2011	3:52:44 PM	Helium valve closed
3/24/2011	3:52:44 PM	H2 valve closed
3/24/2011	3:52:44 PM	BCl3 valve closed
3/24/2011	3:52:44 PM	PH3 valve closed
3/24/2011	3:52:44 PM	SiCl4 pre valve closed
3/24/2011	3:52:44 PM	SiCl4 post valve closed
3/24/2011	3:52:44 PM	Main Vac valve closed
3/24/2011	3:52:44 PM	Bypass valve closed
3/24/2011	3:52:44 PM	Bubbler valve closed
3/24/2011	3:52:44 PM	Helium MFC set to  0.000000
3/24/2011	3:52:44 PM	H2 MFC set to  0.000000
3/24/2011	3:52:44 PM	BCl3 MFC set to  0.000000
3/24/2011	3:52:44 PM	PHl3 MFC set to  0.000000
3/24/2011	3:52:44 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:52:44 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:52:44 PM	Tube furnace set to 0
3/24/2011	3:52:44 PM	Run finished at 3:52 PM
3/24/2011	3:55:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	3:55:48 PM	Recipe started at 3:55 PM
3/24/2011	3:55:48 PM	Helium valve closed
3/24/2011	3:55:48 PM	H2 valve closed
3/24/2011	3:55:48 PM	BCl3 valve closed
3/24/2011	3:55:48 PM	PH3 valve closed
3/24/2011	3:55:48 PM	SiCl4 pre valve closed
3/24/2011	3:55:48 PM	SiCl4 post valve closed
3/24/2011	3:55:48 PM	Main Vac valve closed
3/24/2011	3:55:48 PM	Bubbler valve closed
3/24/2011	3:55:48 PM	Bypass valve opened
3/24/2011	3:55:48 PM	Helium MFC set to  0.000000
3/24/2011	3:55:48 PM	H2 MFC set to  0.000000
3/24/2011	3:55:48 PM	BCl3 MFC set to  0.000000
3/24/2011	3:55:48 PM	PHl3 MFC set to  0.000000
3/24/2011	3:55:48 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:55:48 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:55:48 PM	Tube furnace set to 0
3/24/2011	3:56:20 PM	Helium valve closed
3/24/2011	3:56:20 PM	H2 valve closed
3/24/2011	3:56:20 PM	BCl3 valve closed
3/24/2011	3:56:20 PM	PH3 valve closed
3/24/2011	3:56:20 PM	SiCl4 pre valve closed
3/24/2011	3:56:20 PM	SiCl4 post valve closed
3/24/2011	3:56:20 PM	Bubbler valve closed
3/24/2011	3:56:20 PM	Main Vac valve opened
3/24/2011	3:56:20 PM	Bypass valve opened
3/24/2011	3:56:20 PM	Helium MFC set to  0.000000
3/24/2011	3:56:20 PM	H2 MFC set to  0.000000
3/24/2011	3:56:20 PM	BCl3 MFC set to  0.000000
3/24/2011	3:56:20 PM	PHl3 MFC set to  0.000000
3/24/2011	3:56:20 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:56:20 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:56:20 PM	Tube furnace set to 0
3/24/2011	3:57:20 PM	H2 valve closed
3/24/2011	3:57:20 PM	BCl3 valve closed
3/24/2011	3:57:20 PM	PH3 valve closed
3/24/2011	3:57:20 PM	SiCl4 pre valve closed
3/24/2011	3:57:20 PM	SiCl4 post valve closed
3/24/2011	3:57:20 PM	Bubbler valve closed
3/24/2011	3:57:20 PM	Helium valve opened
3/24/2011	3:57:20 PM	Main Vac valve opened
3/24/2011	3:57:20 PM	Bypass valve opened
3/24/2011	3:57:20 PM	Helium MFC set to  100.000000
3/24/2011	3:57:20 PM	H2 MFC set to  0.000000
3/24/2011	3:57:20 PM	BCl3 MFC set to  0.000000
3/24/2011	3:57:20 PM	PHl3 MFC set to  0.000000
3/24/2011	3:57:20 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:57:20 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:57:20 PM	Tube furnace set to 0
3/24/2011	3:58:20 PM	Helium valve closed
3/24/2011	3:58:20 PM	H2 valve closed
3/24/2011	3:58:20 PM	BCl3 valve closed
3/24/2011	3:58:20 PM	PH3 valve closed
3/24/2011	3:58:20 PM	SiCl4 pre valve closed
3/24/2011	3:58:20 PM	SiCl4 post valve closed
3/24/2011	3:58:20 PM	Bubbler valve closed
3/24/2011	3:58:20 PM	Main Vac valve opened
3/24/2011	3:58:20 PM	Bypass valve opened
3/24/2011	3:58:20 PM	Helium MFC set to  0.000000
3/24/2011	3:58:20 PM	H2 MFC set to  0.000000
3/24/2011	3:58:20 PM	BCl3 MFC set to  0.000000
3/24/2011	3:58:20 PM	PHl3 MFC set to  0.000000
3/24/2011	3:58:20 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:58:20 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:58:20 PM	Tube furnace set to 0
3/24/2011	3:59:20 PM	H2 valve closed
3/24/2011	3:59:20 PM	BCl3 valve closed
3/24/2011	3:59:20 PM	PH3 valve closed
3/24/2011	3:59:20 PM	SiCl4 pre valve closed
3/24/2011	3:59:20 PM	SiCl4 post valve closed
3/24/2011	3:59:20 PM	Bubbler valve closed
3/24/2011	3:59:20 PM	Helium valve opened
3/24/2011	3:59:20 PM	Main Vac valve opened
3/24/2011	3:59:20 PM	Bypass valve opened
3/24/2011	3:59:20 PM	Helium MFC set to  100.000000
3/24/2011	3:59:20 PM	H2 MFC set to  0.000000
3/24/2011	3:59:20 PM	BCl3 MFC set to  0.000000
3/24/2011	3:59:20 PM	PHl3 MFC set to  0.000000
3/24/2011	3:59:20 PM	SiCl4 MFC set to  0.000000
3/24/2011	3:59:20 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	3:59:20 PM	Tube furnace set to 0
3/24/2011	4:00:20 PM	Helium valve closed
3/24/2011	4:00:20 PM	H2 valve closed
3/24/2011	4:00:20 PM	BCl3 valve closed
3/24/2011	4:00:20 PM	PH3 valve closed
3/24/2011	4:00:20 PM	SiCl4 pre valve closed
3/24/2011	4:00:21 PM	SiCl4 post valve closed
3/24/2011	4:00:21 PM	Bubbler valve closed
3/24/2011	4:00:21 PM	Main Vac valve opened
3/24/2011	4:00:21 PM	Bypass valve opened
3/24/2011	4:00:21 PM	Helium MFC set to  0.000000
3/24/2011	4:00:21 PM	H2 MFC set to  0.000000
3/24/2011	4:00:21 PM	BCl3 MFC set to  0.000000
3/24/2011	4:00:21 PM	PHl3 MFC set to  0.000000
3/24/2011	4:00:21 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:00:21 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:00:21 PM	Tube furnace set to 0
3/24/2011	4:01:21 PM	H2 valve closed
3/24/2011	4:01:21 PM	BCl3 valve closed
3/24/2011	4:01:21 PM	PH3 valve closed
3/24/2011	4:01:21 PM	SiCl4 pre valve closed
3/24/2011	4:01:21 PM	SiCl4 post valve closed
3/24/2011	4:01:21 PM	Bubbler valve closed
3/24/2011	4:01:21 PM	Helium valve opened
3/24/2011	4:01:21 PM	Main Vac valve opened
3/24/2011	4:01:21 PM	Bypass valve opened
3/24/2011	4:01:21 PM	Helium MFC set to  100.000000
3/24/2011	4:01:21 PM	H2 MFC set to  0.000000
3/24/2011	4:01:21 PM	BCl3 MFC set to  0.000000
3/24/2011	4:01:21 PM	PHl3 MFC set to  0.000000
3/24/2011	4:01:21 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:01:21 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:01:21 PM	Tube furnace set to 0
3/24/2011	4:02:21 PM	Helium valve closed
3/24/2011	4:02:21 PM	H2 valve closed
3/24/2011	4:02:21 PM	BCl3 valve closed
3/24/2011	4:02:21 PM	PH3 valve closed
3/24/2011	4:02:21 PM	SiCl4 pre valve closed
3/24/2011	4:02:21 PM	SiCl4 post valve closed
3/24/2011	4:02:21 PM	Bubbler valve closed
3/24/2011	4:02:21 PM	Main Vac valve opened
3/24/2011	4:02:21 PM	Bypass valve opened
3/24/2011	4:02:21 PM	Helium MFC set to  0.000000
3/24/2011	4:02:21 PM	H2 MFC set to  0.000000
3/24/2011	4:02:21 PM	BCl3 MFC set to  0.000000
3/24/2011	4:02:21 PM	PHl3 MFC set to  0.000000
3/24/2011	4:02:21 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:02:21 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:02:21 PM	Tube furnace set to 0
3/24/2011	4:03:21 PM	H2 valve closed
3/24/2011	4:03:21 PM	BCl3 valve closed
3/24/2011	4:03:21 PM	PH3 valve closed
3/24/2011	4:03:21 PM	SiCl4 pre valve closed
3/24/2011	4:03:21 PM	SiCl4 post valve closed
3/24/2011	4:03:21 PM	Bubbler valve closed
3/24/2011	4:03:21 PM	Helium valve opened
3/24/2011	4:03:21 PM	Main Vac valve opened
3/24/2011	4:03:21 PM	Bypass valve opened
3/24/2011	4:03:21 PM	Helium MFC set to  100.000000
3/24/2011	4:03:21 PM	H2 MFC set to  0.000000
3/24/2011	4:03:21 PM	BCl3 MFC set to  0.000000
3/24/2011	4:03:21 PM	PHl3 MFC set to  0.000000
3/24/2011	4:03:21 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:03:21 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:03:21 PM	Tube furnace set to 0
3/24/2011	4:04:21 PM	Helium valve closed
3/24/2011	4:04:21 PM	H2 valve closed
3/24/2011	4:04:21 PM	BCl3 valve closed
3/24/2011	4:04:21 PM	PH3 valve closed
3/24/2011	4:04:21 PM	SiCl4 pre valve closed
3/24/2011	4:04:21 PM	SiCl4 post valve closed
3/24/2011	4:04:21 PM	Bubbler valve closed
3/24/2011	4:04:21 PM	Main Vac valve opened
3/24/2011	4:04:21 PM	Bypass valve opened
3/24/2011	4:04:21 PM	Helium MFC set to  0.000000
3/24/2011	4:04:21 PM	H2 MFC set to  0.000000
3/24/2011	4:04:21 PM	BCl3 MFC set to  0.000000
3/24/2011	4:04:21 PM	PHl3 MFC set to  0.000000
3/24/2011	4:04:21 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:04:21 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:04:21 PM	Tube furnace set to 0
3/24/2011	4:05:21 PM	H2 valve closed
3/24/2011	4:05:21 PM	BCl3 valve closed
3/24/2011	4:05:21 PM	PH3 valve closed
3/24/2011	4:05:21 PM	SiCl4 pre valve closed
3/24/2011	4:05:22 PM	SiCl4 post valve closed
3/24/2011	4:05:22 PM	Bubbler valve closed
3/24/2011	4:05:22 PM	Helium valve opened
3/24/2011	4:05:22 PM	Main Vac valve opened
3/24/2011	4:05:22 PM	Bypass valve opened
3/24/2011	4:05:22 PM	Helium MFC set to  100.000000
3/24/2011	4:05:22 PM	H2 MFC set to  0.000000
3/24/2011	4:05:22 PM	BCl3 MFC set to  0.000000
3/24/2011	4:05:22 PM	PHl3 MFC set to  0.000000
3/24/2011	4:05:22 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:05:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:05:22 PM	Tube furnace set to 0
3/24/2011	4:06:22 PM	Helium valve closed
3/24/2011	4:06:22 PM	H2 valve closed
3/24/2011	4:06:22 PM	BCl3 valve closed
3/24/2011	4:06:22 PM	PH3 valve closed
3/24/2011	4:06:22 PM	SiCl4 pre valve closed
3/24/2011	4:06:22 PM	SiCl4 post valve closed
3/24/2011	4:06:22 PM	Bubbler valve closed
3/24/2011	4:06:22 PM	Main Vac valve opened
3/24/2011	4:06:22 PM	Bypass valve opened
3/24/2011	4:06:22 PM	Helium MFC set to  0.000000
3/24/2011	4:06:22 PM	H2 MFC set to  0.000000
3/24/2011	4:06:22 PM	BCl3 MFC set to  0.000000
3/24/2011	4:06:22 PM	PHl3 MFC set to  0.000000
3/24/2011	4:06:22 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:06:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:06:22 PM	Tube furnace set to 0
3/24/2011	4:07:22 PM	H2 valve closed
3/24/2011	4:07:22 PM	BCl3 valve closed
3/24/2011	4:07:22 PM	PH3 valve closed
3/24/2011	4:07:22 PM	SiCl4 pre valve closed
3/24/2011	4:07:22 PM	SiCl4 post valve closed
3/24/2011	4:07:22 PM	Bubbler valve closed
3/24/2011	4:07:22 PM	Helium valve opened
3/24/2011	4:07:22 PM	Main Vac valve opened
3/24/2011	4:07:22 PM	Bypass valve opened
3/24/2011	4:07:22 PM	Helium MFC set to  100.000000
3/24/2011	4:07:22 PM	H2 MFC set to  0.000000
3/24/2011	4:07:22 PM	BCl3 MFC set to  0.000000
3/24/2011	4:07:22 PM	PHl3 MFC set to  0.000000
3/24/2011	4:07:22 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:07:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:07:22 PM	Tube furnace set to 0
3/24/2011	4:08:22 PM	Helium valve closed
3/24/2011	4:08:22 PM	H2 valve closed
3/24/2011	4:08:22 PM	BCl3 valve closed
3/24/2011	4:08:22 PM	PH3 valve closed
3/24/2011	4:08:22 PM	SiCl4 pre valve closed
3/24/2011	4:08:22 PM	SiCl4 post valve closed
3/24/2011	4:08:22 PM	Bubbler valve closed
3/24/2011	4:08:22 PM	Main Vac valve opened
3/24/2011	4:08:22 PM	Bypass valve opened
3/24/2011	4:08:22 PM	Helium MFC set to  0.000000
3/24/2011	4:08:22 PM	H2 MFC set to  0.000000
3/24/2011	4:08:22 PM	BCl3 MFC set to  0.000000
3/24/2011	4:08:22 PM	PHl3 MFC set to  0.000000
3/24/2011	4:08:22 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:08:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:08:22 PM	Tube furnace set to 0
3/24/2011	4:09:22 PM	H2 valve closed
3/24/2011	4:09:22 PM	BCl3 valve closed
3/24/2011	4:09:22 PM	PH3 valve closed
3/24/2011	4:09:22 PM	SiCl4 pre valve closed
3/24/2011	4:09:22 PM	SiCl4 post valve closed
3/24/2011	4:09:22 PM	Bubbler valve closed
3/24/2011	4:09:22 PM	Helium valve opened
3/24/2011	4:09:22 PM	Main Vac valve opened
3/24/2011	4:09:22 PM	Bypass valve opened
3/24/2011	4:09:22 PM	Helium MFC set to  100.000000
3/24/2011	4:09:22 PM	H2 MFC set to  0.000000
3/24/2011	4:09:22 PM	BCl3 MFC set to  0.000000
3/24/2011	4:09:22 PM	PHl3 MFC set to  0.000000
3/24/2011	4:09:22 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:09:22 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:09:22 PM	Tube furnace set to 0
3/24/2011	4:10:22 PM	Helium valve closed
3/24/2011	4:10:22 PM	H2 valve closed
3/24/2011	4:10:22 PM	BCl3 valve closed
3/24/2011	4:10:22 PM	PH3 valve closed
3/24/2011	4:10:22 PM	SiCl4 pre valve closed
3/24/2011	4:10:22 PM	SiCl4 post valve closed
3/24/2011	4:10:22 PM	Bubbler valve closed
3/24/2011	4:10:22 PM	Main Vac valve opened
3/24/2011	4:10:22 PM	Bypass valve opened
3/24/2011	4:10:22 PM	Helium MFC set to  0.000000
3/24/2011	4:10:23 PM	H2 MFC set to  0.000000
3/24/2011	4:10:23 PM	BCl3 MFC set to  0.000000
3/24/2011	4:10:23 PM	PHl3 MFC set to  0.000000
3/24/2011	4:10:23 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:10:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:10:23 PM	Tube furnace set to 0
3/24/2011	4:11:23 PM	H2 valve closed
3/24/2011	4:11:23 PM	BCl3 valve closed
3/24/2011	4:11:23 PM	PH3 valve closed
3/24/2011	4:11:23 PM	SiCl4 pre valve closed
3/24/2011	4:11:23 PM	SiCl4 post valve closed
3/24/2011	4:11:23 PM	Bubbler valve closed
3/24/2011	4:11:23 PM	Helium valve opened
3/24/2011	4:11:23 PM	Main Vac valve opened
3/24/2011	4:11:23 PM	Bypass valve opened
3/24/2011	4:11:23 PM	Helium MFC set to  100.000000
3/24/2011	4:11:23 PM	H2 MFC set to  0.000000
3/24/2011	4:11:23 PM	BCl3 MFC set to  0.000000
3/24/2011	4:11:23 PM	PHl3 MFC set to  0.000000
3/24/2011	4:11:23 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:11:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:11:23 PM	Tube furnace set to 0
3/24/2011	4:12:23 PM	Helium valve closed
3/24/2011	4:12:23 PM	H2 valve closed
3/24/2011	4:12:23 PM	BCl3 valve closed
3/24/2011	4:12:23 PM	PH3 valve closed
3/24/2011	4:12:23 PM	SiCl4 pre valve closed
3/24/2011	4:12:23 PM	SiCl4 post valve closed
3/24/2011	4:12:23 PM	Bubbler valve closed
3/24/2011	4:12:23 PM	Main Vac valve opened
3/24/2011	4:12:23 PM	Bypass valve opened
3/24/2011	4:12:23 PM	Helium MFC set to  0.000000
3/24/2011	4:12:23 PM	H2 MFC set to  0.000000
3/24/2011	4:12:23 PM	BCl3 MFC set to  0.000000
3/24/2011	4:12:23 PM	PHl3 MFC set to  0.000000
3/24/2011	4:12:23 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:12:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:12:23 PM	Tube furnace set to 0
3/24/2011	4:13:23 PM	H2 valve closed
3/24/2011	4:13:23 PM	BCl3 valve closed
3/24/2011	4:13:23 PM	PH3 valve closed
3/24/2011	4:13:23 PM	SiCl4 pre valve closed
3/24/2011	4:13:23 PM	SiCl4 post valve closed
3/24/2011	4:13:23 PM	Bubbler valve closed
3/24/2011	4:13:23 PM	Helium valve opened
3/24/2011	4:13:23 PM	Main Vac valve opened
3/24/2011	4:13:23 PM	Bypass valve opened
3/24/2011	4:13:23 PM	Helium MFC set to  100.000000
3/24/2011	4:13:23 PM	H2 MFC set to  0.000000
3/24/2011	4:13:23 PM	BCl3 MFC set to  0.000000
3/24/2011	4:13:23 PM	PHl3 MFC set to  0.000000
3/24/2011	4:13:23 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:13:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:13:23 PM	Tube furnace set to 0
3/24/2011	4:14:23 PM	Helium valve closed
3/24/2011	4:14:23 PM	H2 valve closed
3/24/2011	4:14:23 PM	BCl3 valve closed
3/24/2011	4:14:23 PM	PH3 valve closed
3/24/2011	4:14:23 PM	SiCl4 pre valve closed
3/24/2011	4:14:23 PM	SiCl4 post valve closed
3/24/2011	4:14:23 PM	Bubbler valve closed
3/24/2011	4:14:23 PM	Main Vac valve opened
3/24/2011	4:14:23 PM	Bypass valve opened
3/24/2011	4:14:23 PM	Helium MFC set to  0.000000
3/24/2011	4:14:23 PM	H2 MFC set to  0.000000
3/24/2011	4:14:23 PM	BCl3 MFC set to  0.000000
3/24/2011	4:14:23 PM	PHl3 MFC set to  0.000000
3/24/2011	4:14:23 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:14:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:14:23 PM	Tube furnace set to 0
3/24/2011	4:15:23 PM	H2 valve closed
3/24/2011	4:15:23 PM	BCl3 valve closed
3/24/2011	4:15:23 PM	PH3 valve closed
3/24/2011	4:15:23 PM	SiCl4 pre valve closed
3/24/2011	4:15:23 PM	SiCl4 post valve closed
3/24/2011	4:15:23 PM	Bubbler valve closed
3/24/2011	4:15:23 PM	Helium valve opened
3/24/2011	4:15:23 PM	Main Vac valve opened
3/24/2011	4:15:23 PM	Bypass valve opened
3/24/2011	4:15:23 PM	Helium MFC set to  100.000000
3/24/2011	4:15:23 PM	H2 MFC set to  0.000000
3/24/2011	4:15:23 PM	BCl3 MFC set to  0.000000
3/24/2011	4:15:23 PM	PHl3 MFC set to  0.000000
3/24/2011	4:15:23 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:15:23 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:15:24 PM	Tube furnace set to 0
3/24/2011	4:16:24 PM	Helium valve closed
3/24/2011	4:16:24 PM	H2 valve closed
3/24/2011	4:16:24 PM	BCl3 valve closed
3/24/2011	4:16:24 PM	PH3 valve closed
3/24/2011	4:16:24 PM	SiCl4 pre valve closed
3/24/2011	4:16:24 PM	SiCl4 post valve closed
3/24/2011	4:16:24 PM	Bubbler valve closed
3/24/2011	4:16:24 PM	Main Vac valve opened
3/24/2011	4:16:24 PM	Bypass valve opened
3/24/2011	4:16:24 PM	Helium MFC set to  0.000000
3/24/2011	4:16:24 PM	H2 MFC set to  0.000000
3/24/2011	4:16:24 PM	BCl3 MFC set to  0.000000
3/24/2011	4:16:24 PM	PHl3 MFC set to  0.000000
3/24/2011	4:16:24 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:16:24 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:16:24 PM	Tube furnace set to 0
3/24/2011	4:16:25 PM	Run finished at 4:16 PM
3/24/2011	4:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	4:18:12 PM	Recipe started at 4:18 PM
3/24/2011	4:18:12 PM	Helium valve closed
3/24/2011	4:18:12 PM	BCl3 valve closed
3/24/2011	4:18:12 PM	PH3 valve closed
3/24/2011	4:18:12 PM	SiCl4 pre valve closed
3/24/2011	4:18:12 PM	SiCl4 post valve closed
3/24/2011	4:18:12 PM	Main Vac valve closed
3/24/2011	4:18:12 PM	Bypass valve closed
3/24/2011	4:18:12 PM	Bubbler valve closed
3/24/2011	4:18:12 PM	H2 valve opened
3/24/2011	4:18:12 PM	Helium MFC set to  0.000000
3/24/2011	4:18:12 PM	H2 MFC set to  500.000000
3/24/2011	4:18:12 PM	BCl3 MFC set to  0.000000
3/24/2011	4:18:12 PM	PHl3 MFC set to  0.000000
3/24/2011	4:18:12 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:18:12 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:18:12 PM	Tube furnace set to 0
3/24/2011	4:19:29 PM	Helium valve closed
3/24/2011	4:19:29 PM	BCl3 valve closed
3/24/2011	4:19:29 PM	PH3 valve closed
3/24/2011	4:19:29 PM	SiCl4 pre valve closed
3/24/2011	4:19:29 PM	SiCl4 post valve closed
3/24/2011	4:19:29 PM	Main Vac valve closed
3/24/2011	4:19:29 PM	Bypass valve closed
3/24/2011	4:19:29 PM	H2 valve opened
3/24/2011	4:19:29 PM	Bubbler valve opened
3/24/2011	4:19:29 PM	Helium MFC set to  0.000000
3/24/2011	4:19:29 PM	H2 MFC set to  500.000000
3/24/2011	4:19:29 PM	BCl3 MFC set to  0.000000
3/24/2011	4:19:29 PM	PHl3 MFC set to  0.000000
3/24/2011	4:19:29 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:19:29 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:19:29 PM	Tube furnace set to 1000
3/24/2011	4:39:29 PM	Helium valve closed
3/24/2011	4:39:29 PM	PH3 valve closed
3/24/2011	4:39:29 PM	Main Vac valve closed
3/24/2011	4:39:29 PM	Bypass valve closed
3/24/2011	4:39:29 PM	H2 valve opened
3/24/2011	4:39:29 PM	BCl3 valve opened
3/24/2011	4:39:29 PM	SiCl4 pre valve opened
3/24/2011	4:39:29 PM	SiCl4 post valve opened
3/24/2011	4:39:29 PM	Bubbler valve opened
3/24/2011	4:39:29 PM	Helium MFC set to  0.000000
3/24/2011	4:39:29 PM	H2 MFC set to  500.000000
3/24/2011	4:39:29 PM	BCl3 MFC set to  3.000000
3/24/2011	4:39:29 PM	PHl3 MFC set to  0.000000
3/24/2011	4:39:29 PM	SiCl4 MFC set to  50.000000
3/24/2011	4:39:29 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:39:30 PM	Tube furnace set to 1000
3/24/2011	4:59:30 PM	H2 valve closed
3/24/2011	4:59:30 PM	BCl3 valve closed
3/24/2011	4:59:30 PM	PH3 valve closed
3/24/2011	4:59:30 PM	SiCl4 pre valve closed
3/24/2011	4:59:30 PM	SiCl4 post valve closed
3/24/2011	4:59:30 PM	Main Vac valve closed
3/24/2011	4:59:30 PM	Bypass valve closed
3/24/2011	4:59:30 PM	Helium valve opened
3/24/2011	4:59:30 PM	Bubbler valve opened
3/24/2011	4:59:30 PM	Helium MFC set to  500.000000
3/24/2011	4:59:30 PM	H2 MFC set to  0.000000
3/24/2011	4:59:30 PM	BCl3 MFC set to  0.000000
3/24/2011	4:59:30 PM	PHl3 MFC set to  0.000000
3/24/2011	4:59:30 PM	SiCl4 MFC set to  0.000000
3/24/2011	4:59:30 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	4:59:30 PM	Tube furnace set to 0
3/24/2011	5:19:30 PM	Helium valve closed
3/24/2011	5:19:30 PM	H2 valve closed
3/24/2011	5:19:30 PM	BCl3 valve closed
3/24/2011	5:19:30 PM	PH3 valve closed
3/24/2011	5:19:30 PM	SiCl4 pre valve closed
3/24/2011	5:19:30 PM	SiCl4 post valve closed
3/24/2011	5:19:30 PM	Main Vac valve closed
3/24/2011	5:19:30 PM	Bypass valve closed
3/24/2011	5:19:30 PM	Bubbler valve closed
3/24/2011	5:19:30 PM	Helium MFC set to  0.000000
3/24/2011	5:19:30 PM	H2 MFC set to  0.000000
3/24/2011	5:19:30 PM	BCl3 MFC set to  0.000000
3/24/2011	5:19:30 PM	PHl3 MFC set to  0.000000
3/24/2011	5:19:30 PM	SiCl4 MFC set to  0.000000
3/24/2011	5:19:30 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	5:19:30 PM	Tube furnace set to 0
3/24/2011	5:19:30 PM	Run finished at 5:19 PM
3/24/2011	6:18:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	6:18:34 PM	Recipe started at 6:18 PM
3/24/2011	6:18:34 PM	Helium valve closed
3/24/2011	6:18:34 PM	H2 valve closed
3/24/2011	6:18:34 PM	BCl3 valve closed
3/24/2011	6:18:34 PM	PH3 valve closed
3/24/2011	6:18:34 PM	SiCl4 pre valve closed
3/24/2011	6:18:34 PM	SiCl4 post valve closed
3/24/2011	6:18:34 PM	Main Vac valve closed
3/24/2011	6:18:34 PM	Bubbler valve closed
3/24/2011	6:18:34 PM	Bypass valve opened
3/24/2011	6:18:34 PM	Helium MFC set to  0.000000
3/24/2011	6:18:34 PM	H2 MFC set to  0.000000
3/24/2011	6:18:34 PM	BCl3 MFC set to  0.000000
3/24/2011	6:18:34 PM	PHl3 MFC set to  0.000000
3/24/2011	6:18:34 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:18:34 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:18:34 PM	Tube furnace set to 0
3/24/2011	6:19:07 PM	Helium valve closed
3/24/2011	6:19:07 PM	H2 valve closed
3/24/2011	6:19:07 PM	BCl3 valve closed
3/24/2011	6:19:07 PM	PH3 valve closed
3/24/2011	6:19:07 PM	SiCl4 pre valve closed
3/24/2011	6:19:07 PM	SiCl4 post valve closed
3/24/2011	6:19:07 PM	Bubbler valve closed
3/24/2011	6:19:07 PM	Main Vac valve opened
3/24/2011	6:19:07 PM	Bypass valve opened
3/24/2011	6:19:07 PM	Helium MFC set to  0.000000
3/24/2011	6:19:07 PM	H2 MFC set to  0.000000
3/24/2011	6:19:07 PM	BCl3 MFC set to  0.000000
3/24/2011	6:19:07 PM	PHl3 MFC set to  0.000000
3/24/2011	6:19:07 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:19:07 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:19:08 PM	Tube furnace set to 0
3/24/2011	6:20:08 PM	H2 valve closed
3/24/2011	6:20:08 PM	BCl3 valve closed
3/24/2011	6:20:08 PM	PH3 valve closed
3/24/2011	6:20:08 PM	SiCl4 pre valve closed
3/24/2011	6:20:08 PM	SiCl4 post valve closed
3/24/2011	6:20:08 PM	Bubbler valve closed
3/24/2011	6:20:08 PM	Helium valve opened
3/24/2011	6:20:08 PM	Main Vac valve opened
3/24/2011	6:20:08 PM	Bypass valve opened
3/24/2011	6:20:08 PM	Helium MFC set to  100.000000
3/24/2011	6:20:08 PM	H2 MFC set to  0.000000
3/24/2011	6:20:08 PM	BCl3 MFC set to  0.000000
3/24/2011	6:20:08 PM	PHl3 MFC set to  0.000000
3/24/2011	6:20:08 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:20:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:20:08 PM	Tube furnace set to 0
3/24/2011	6:21:08 PM	Helium valve closed
3/24/2011	6:21:08 PM	H2 valve closed
3/24/2011	6:21:08 PM	BCl3 valve closed
3/24/2011	6:21:08 PM	PH3 valve closed
3/24/2011	6:21:08 PM	SiCl4 pre valve closed
3/24/2011	6:21:08 PM	SiCl4 post valve closed
3/24/2011	6:21:08 PM	Bubbler valve closed
3/24/2011	6:21:08 PM	Main Vac valve opened
3/24/2011	6:21:08 PM	Bypass valve opened
3/24/2011	6:21:08 PM	Helium MFC set to  0.000000
3/24/2011	6:21:08 PM	H2 MFC set to  0.000000
3/24/2011	6:21:08 PM	BCl3 MFC set to  0.000000
3/24/2011	6:21:08 PM	PHl3 MFC set to  0.000000
3/24/2011	6:21:08 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:21:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:21:08 PM	Tube furnace set to 0
3/24/2011	6:22:08 PM	H2 valve closed
3/24/2011	6:22:08 PM	BCl3 valve closed
3/24/2011	6:22:08 PM	PH3 valve closed
3/24/2011	6:22:08 PM	SiCl4 pre valve closed
3/24/2011	6:22:08 PM	SiCl4 post valve closed
3/24/2011	6:22:08 PM	Bubbler valve closed
3/24/2011	6:22:08 PM	Helium valve opened
3/24/2011	6:22:08 PM	Main Vac valve opened
3/24/2011	6:22:08 PM	Bypass valve opened
3/24/2011	6:22:08 PM	Helium MFC set to  100.000000
3/24/2011	6:22:08 PM	H2 MFC set to  0.000000
3/24/2011	6:22:08 PM	BCl3 MFC set to  0.000000
3/24/2011	6:22:08 PM	PHl3 MFC set to  0.000000
3/24/2011	6:22:08 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:22:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:22:08 PM	Tube furnace set to 0
3/24/2011	6:23:08 PM	Helium valve closed
3/24/2011	6:23:08 PM	H2 valve closed
3/24/2011	6:23:08 PM	BCl3 valve closed
3/24/2011	6:23:08 PM	PH3 valve closed
3/24/2011	6:23:08 PM	SiCl4 pre valve closed
3/24/2011	6:23:08 PM	SiCl4 post valve closed
3/24/2011	6:23:08 PM	Bubbler valve closed
3/24/2011	6:23:08 PM	Main Vac valve opened
3/24/2011	6:23:08 PM	Bypass valve opened
3/24/2011	6:23:08 PM	Helium MFC set to  0.000000
3/24/2011	6:23:08 PM	H2 MFC set to  0.000000
3/24/2011	6:23:08 PM	BCl3 MFC set to  0.000000
3/24/2011	6:23:08 PM	PHl3 MFC set to  0.000000
3/24/2011	6:23:08 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:23:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:23:08 PM	Tube furnace set to 0
3/24/2011	6:24:08 PM	H2 valve closed
3/24/2011	6:24:08 PM	BCl3 valve closed
3/24/2011	6:24:08 PM	PH3 valve closed
3/24/2011	6:24:08 PM	SiCl4 pre valve closed
3/24/2011	6:24:08 PM	SiCl4 post valve closed
3/24/2011	6:24:08 PM	Bubbler valve closed
3/24/2011	6:24:08 PM	Helium valve opened
3/24/2011	6:24:08 PM	Main Vac valve opened
3/24/2011	6:24:08 PM	Bypass valve opened
3/24/2011	6:24:08 PM	Helium MFC set to  100.000000
3/24/2011	6:24:08 PM	H2 MFC set to  0.000000
3/24/2011	6:24:08 PM	BCl3 MFC set to  0.000000
3/24/2011	6:24:08 PM	PHl3 MFC set to  0.000000
3/24/2011	6:24:08 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:24:08 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:24:09 PM	Tube furnace set to 0
3/24/2011	6:25:09 PM	Helium valve closed
3/24/2011	6:25:09 PM	H2 valve closed
3/24/2011	6:25:09 PM	BCl3 valve closed
3/24/2011	6:25:09 PM	PH3 valve closed
3/24/2011	6:25:09 PM	SiCl4 pre valve closed
3/24/2011	6:25:09 PM	SiCl4 post valve closed
3/24/2011	6:25:09 PM	Bubbler valve closed
3/24/2011	6:25:09 PM	Main Vac valve opened
3/24/2011	6:25:09 PM	Bypass valve opened
3/24/2011	6:25:09 PM	Helium MFC set to  0.000000
3/24/2011	6:25:09 PM	H2 MFC set to  0.000000
3/24/2011	6:25:09 PM	BCl3 MFC set to  0.000000
3/24/2011	6:25:09 PM	PHl3 MFC set to  0.000000
3/24/2011	6:25:09 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:25:09 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:25:09 PM	Tube furnace set to 0
3/24/2011	6:26:09 PM	H2 valve closed
3/24/2011	6:26:09 PM	BCl3 valve closed
3/24/2011	6:26:09 PM	PH3 valve closed
3/24/2011	6:26:09 PM	SiCl4 pre valve closed
3/24/2011	6:26:09 PM	SiCl4 post valve closed
3/24/2011	6:26:09 PM	Bubbler valve closed
3/24/2011	6:26:09 PM	Helium valve opened
3/24/2011	6:26:09 PM	Main Vac valve opened
3/24/2011	6:26:09 PM	Bypass valve opened
3/24/2011	6:26:09 PM	Helium MFC set to  100.000000
3/24/2011	6:26:09 PM	H2 MFC set to  0.000000
3/24/2011	6:26:09 PM	BCl3 MFC set to  0.000000
3/24/2011	6:26:09 PM	PHl3 MFC set to  0.000000
3/24/2011	6:26:09 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:26:09 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:26:09 PM	Tube furnace set to 0
3/24/2011	6:27:09 PM	Helium valve closed
3/24/2011	6:27:09 PM	H2 valve closed
3/24/2011	6:27:09 PM	BCl3 valve closed
3/24/2011	6:27:09 PM	PH3 valve closed
3/24/2011	6:27:09 PM	SiCl4 pre valve closed
3/24/2011	6:27:09 PM	SiCl4 post valve closed
3/24/2011	6:27:09 PM	Bubbler valve closed
3/24/2011	6:27:09 PM	Main Vac valve opened
3/24/2011	6:27:09 PM	Bypass valve opened
3/24/2011	6:27:09 PM	Helium MFC set to  0.000000
3/24/2011	6:27:09 PM	H2 MFC set to  0.000000
3/24/2011	6:27:09 PM	BCl3 MFC set to  0.000000
3/24/2011	6:27:09 PM	PHl3 MFC set to  0.000000
3/24/2011	6:27:09 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:27:09 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:27:09 PM	Tube furnace set to 0
3/24/2011	6:28:09 PM	H2 valve closed
3/24/2011	6:28:09 PM	BCl3 valve closed
3/24/2011	6:28:09 PM	PH3 valve closed
3/24/2011	6:28:09 PM	SiCl4 pre valve closed
3/24/2011	6:28:09 PM	SiCl4 post valve closed
3/24/2011	6:28:09 PM	Bubbler valve closed
3/24/2011	6:28:09 PM	Helium valve opened
3/24/2011	6:28:09 PM	Main Vac valve opened
3/24/2011	6:28:09 PM	Bypass valve opened
3/24/2011	6:28:09 PM	Helium MFC set to  100.000000
3/24/2011	6:28:09 PM	H2 MFC set to  0.000000
3/24/2011	6:28:09 PM	BCl3 MFC set to  0.000000
3/24/2011	6:28:09 PM	PHl3 MFC set to  0.000000
3/24/2011	6:28:09 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:28:09 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:28:09 PM	Tube furnace set to 0
3/24/2011	6:29:09 PM	Helium valve closed
3/24/2011	6:29:09 PM	H2 valve closed
3/24/2011	6:29:09 PM	BCl3 valve closed
3/24/2011	6:29:09 PM	PH3 valve closed
3/24/2011	6:29:09 PM	SiCl4 pre valve closed
3/24/2011	6:29:09 PM	SiCl4 post valve closed
3/24/2011	6:29:09 PM	Bubbler valve closed
3/24/2011	6:29:09 PM	Main Vac valve opened
3/24/2011	6:29:09 PM	Bypass valve opened
3/24/2011	6:29:09 PM	Helium MFC set to  0.000000
3/24/2011	6:29:09 PM	H2 MFC set to  0.000000
3/24/2011	6:29:09 PM	BCl3 MFC set to  0.000000
3/24/2011	6:29:09 PM	PHl3 MFC set to  0.000000
3/24/2011	6:29:09 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:29:09 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:29:10 PM	Tube furnace set to 0
3/24/2011	6:30:10 PM	H2 valve closed
3/24/2011	6:30:10 PM	BCl3 valve closed
3/24/2011	6:30:10 PM	PH3 valve closed
3/24/2011	6:30:10 PM	SiCl4 pre valve closed
3/24/2011	6:30:10 PM	SiCl4 post valve closed
3/24/2011	6:30:10 PM	Bubbler valve closed
3/24/2011	6:30:10 PM	Helium valve opened
3/24/2011	6:30:10 PM	Main Vac valve opened
3/24/2011	6:30:10 PM	Bypass valve opened
3/24/2011	6:30:10 PM	Helium MFC set to  100.000000
3/24/2011	6:30:10 PM	H2 MFC set to  0.000000
3/24/2011	6:30:10 PM	BCl3 MFC set to  0.000000
3/24/2011	6:30:10 PM	PHl3 MFC set to  0.000000
3/24/2011	6:30:10 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:30:10 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:30:10 PM	Tube furnace set to 0
3/24/2011	6:31:10 PM	Helium valve closed
3/24/2011	6:31:10 PM	H2 valve closed
3/24/2011	6:31:10 PM	BCl3 valve closed
3/24/2011	6:31:10 PM	PH3 valve closed
3/24/2011	6:31:10 PM	SiCl4 pre valve closed
3/24/2011	6:31:10 PM	SiCl4 post valve closed
3/24/2011	6:31:10 PM	Bubbler valve closed
3/24/2011	6:31:10 PM	Main Vac valve opened
3/24/2011	6:31:10 PM	Bypass valve opened
3/24/2011	6:31:10 PM	Helium MFC set to  0.000000
3/24/2011	6:31:10 PM	H2 MFC set to  0.000000
3/24/2011	6:31:10 PM	BCl3 MFC set to  0.000000
3/24/2011	6:31:10 PM	PHl3 MFC set to  0.000000
3/24/2011	6:31:10 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:31:10 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:31:10 PM	Tube furnace set to 0
3/24/2011	6:32:10 PM	H2 valve closed
3/24/2011	6:32:10 PM	BCl3 valve closed
3/24/2011	6:32:10 PM	PH3 valve closed
3/24/2011	6:32:10 PM	SiCl4 pre valve closed
3/24/2011	6:32:10 PM	SiCl4 post valve closed
3/24/2011	6:32:10 PM	Bubbler valve closed
3/24/2011	6:32:10 PM	Helium valve opened
3/24/2011	6:32:10 PM	Main Vac valve opened
3/24/2011	6:32:10 PM	Bypass valve opened
3/24/2011	6:32:10 PM	Helium MFC set to  100.000000
3/24/2011	6:32:10 PM	H2 MFC set to  0.000000
3/24/2011	6:32:10 PM	BCl3 MFC set to  0.000000
3/24/2011	6:32:10 PM	PHl3 MFC set to  0.000000
3/24/2011	6:32:10 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:32:10 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:32:10 PM	Tube furnace set to 0
3/24/2011	6:33:10 PM	Helium valve closed
3/24/2011	6:33:10 PM	H2 valve closed
3/24/2011	6:33:10 PM	BCl3 valve closed
3/24/2011	6:33:10 PM	PH3 valve closed
3/24/2011	6:33:10 PM	SiCl4 pre valve closed
3/24/2011	6:33:10 PM	SiCl4 post valve closed
3/24/2011	6:33:10 PM	Bubbler valve closed
3/24/2011	6:33:10 PM	Main Vac valve opened
3/24/2011	6:33:10 PM	Bypass valve opened
3/24/2011	6:33:10 PM	Helium MFC set to  0.000000
3/24/2011	6:33:10 PM	H2 MFC set to  0.000000
3/24/2011	6:33:10 PM	BCl3 MFC set to  0.000000
3/24/2011	6:33:10 PM	PHl3 MFC set to  0.000000
3/24/2011	6:33:10 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:33:10 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:33:10 PM	Tube furnace set to 0
3/24/2011	6:34:10 PM	H2 valve closed
3/24/2011	6:34:10 PM	BCl3 valve closed
3/24/2011	6:34:10 PM	PH3 valve closed
3/24/2011	6:34:10 PM	SiCl4 pre valve closed
3/24/2011	6:34:10 PM	SiCl4 post valve closed
3/24/2011	6:34:10 PM	Bubbler valve closed
3/24/2011	6:34:10 PM	Helium valve opened
3/24/2011	6:34:10 PM	Main Vac valve opened
3/24/2011	6:34:10 PM	Bypass valve opened
3/24/2011	6:34:10 PM	Helium MFC set to  100.000000
3/24/2011	6:34:10 PM	H2 MFC set to  0.000000
3/24/2011	6:34:10 PM	BCl3 MFC set to  0.000000
3/24/2011	6:34:10 PM	PHl3 MFC set to  0.000000
3/24/2011	6:34:10 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:34:10 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:34:11 PM	Tube furnace set to 0
3/24/2011	6:35:11 PM	Helium valve closed
3/24/2011	6:35:11 PM	H2 valve closed
3/24/2011	6:35:11 PM	BCl3 valve closed
3/24/2011	6:35:11 PM	PH3 valve closed
3/24/2011	6:35:11 PM	SiCl4 pre valve closed
3/24/2011	6:35:11 PM	SiCl4 post valve closed
3/24/2011	6:35:11 PM	Bubbler valve closed
3/24/2011	6:35:11 PM	Main Vac valve opened
3/24/2011	6:35:11 PM	Bypass valve opened
3/24/2011	6:35:11 PM	Helium MFC set to  0.000000
3/24/2011	6:35:11 PM	H2 MFC set to  0.000000
3/24/2011	6:35:11 PM	BCl3 MFC set to  0.000000
3/24/2011	6:35:11 PM	PHl3 MFC set to  0.000000
3/24/2011	6:35:11 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:35:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:35:11 PM	Tube furnace set to 0
3/24/2011	6:36:11 PM	H2 valve closed
3/24/2011	6:36:11 PM	BCl3 valve closed
3/24/2011	6:36:11 PM	PH3 valve closed
3/24/2011	6:36:11 PM	SiCl4 pre valve closed
3/24/2011	6:36:11 PM	SiCl4 post valve closed
3/24/2011	6:36:11 PM	Bubbler valve closed
3/24/2011	6:36:11 PM	Helium valve opened
3/24/2011	6:36:11 PM	Main Vac valve opened
3/24/2011	6:36:11 PM	Bypass valve opened
3/24/2011	6:36:11 PM	Helium MFC set to  100.000000
3/24/2011	6:36:11 PM	H2 MFC set to  0.000000
3/24/2011	6:36:11 PM	BCl3 MFC set to  0.000000
3/24/2011	6:36:11 PM	PHl3 MFC set to  0.000000
3/24/2011	6:36:11 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:36:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:36:11 PM	Tube furnace set to 0
3/24/2011	6:37:11 PM	Helium valve closed
3/24/2011	6:37:11 PM	H2 valve closed
3/24/2011	6:37:11 PM	BCl3 valve closed
3/24/2011	6:37:11 PM	PH3 valve closed
3/24/2011	6:37:11 PM	SiCl4 pre valve closed
3/24/2011	6:37:11 PM	SiCl4 post valve closed
3/24/2011	6:37:11 PM	Bubbler valve closed
3/24/2011	6:37:11 PM	Main Vac valve opened
3/24/2011	6:37:11 PM	Bypass valve opened
3/24/2011	6:37:11 PM	Helium MFC set to  0.000000
3/24/2011	6:37:11 PM	H2 MFC set to  0.000000
3/24/2011	6:37:11 PM	BCl3 MFC set to  0.000000
3/24/2011	6:37:11 PM	PHl3 MFC set to  0.000000
3/24/2011	6:37:11 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:37:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:37:11 PM	Tube furnace set to 0
3/24/2011	6:38:11 PM	H2 valve closed
3/24/2011	6:38:11 PM	BCl3 valve closed
3/24/2011	6:38:11 PM	PH3 valve closed
3/24/2011	6:38:11 PM	SiCl4 pre valve closed
3/24/2011	6:38:11 PM	SiCl4 post valve closed
3/24/2011	6:38:11 PM	Bubbler valve closed
3/24/2011	6:38:11 PM	Helium valve opened
3/24/2011	6:38:11 PM	Main Vac valve opened
3/24/2011	6:38:11 PM	Bypass valve opened
3/24/2011	6:38:11 PM	Helium MFC set to  100.000000
3/24/2011	6:38:11 PM	H2 MFC set to  0.000000
3/24/2011	6:38:11 PM	BCl3 MFC set to  0.000000
3/24/2011	6:38:11 PM	PHl3 MFC set to  0.000000
3/24/2011	6:38:11 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:38:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:38:11 PM	Tube furnace set to 0
3/24/2011	6:39:11 PM	Helium valve closed
3/24/2011	6:39:11 PM	H2 valve closed
3/24/2011	6:39:11 PM	BCl3 valve closed
3/24/2011	6:39:11 PM	PH3 valve closed
3/24/2011	6:39:11 PM	SiCl4 pre valve closed
3/24/2011	6:39:11 PM	SiCl4 post valve closed
3/24/2011	6:39:11 PM	Bubbler valve closed
3/24/2011	6:39:11 PM	Main Vac valve opened
3/24/2011	6:39:11 PM	Bypass valve opened
3/24/2011	6:39:11 PM	Helium MFC set to  0.000000
3/24/2011	6:39:11 PM	H2 MFC set to  0.000000
3/24/2011	6:39:11 PM	BCl3 MFC set to  0.000000
3/24/2011	6:39:11 PM	PHl3 MFC set to  0.000000
3/24/2011	6:39:11 PM	SiCl4 MFC set to  0.000000
3/24/2011	6:39:11 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	6:39:12 PM	Tube furnace set to 0
3/24/2011	6:39:13 PM	Run finished at 6:39 PM
3/24/2011	6:39:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/24/2011	7:27:39 PM	Recipe started at 7:27 PM
3/24/2011	7:27:39 PM	Helium valve closed
3/24/2011	7:27:39 PM	BCl3 valve closed
3/24/2011	7:27:39 PM	PH3 valve closed
3/24/2011	7:27:39 PM	SiCl4 pre valve closed
3/24/2011	7:27:39 PM	SiCl4 post valve closed
3/24/2011	7:27:39 PM	Main Vac valve closed
3/24/2011	7:27:39 PM	Bypass valve closed
3/24/2011	7:27:39 PM	Bubbler valve closed
3/24/2011	7:27:39 PM	H2 valve opened
3/24/2011	7:27:39 PM	Helium MFC set to  0.000000
3/24/2011	7:27:39 PM	H2 MFC set to  500.000000
3/24/2011	7:27:39 PM	BCl3 MFC set to  0.000000
3/24/2011	7:27:39 PM	PHl3 MFC set to  0.000000
3/24/2011	7:27:39 PM	SiCl4 MFC set to  0.000000
3/24/2011	7:27:39 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	7:27:40 PM	Tube furnace set to 0
3/24/2011	7:29:01 PM	Helium valve closed
3/24/2011	7:29:01 PM	BCl3 valve closed
3/24/2011	7:29:01 PM	PH3 valve closed
3/24/2011	7:29:01 PM	SiCl4 pre valve closed
3/24/2011	7:29:01 PM	SiCl4 post valve closed
3/24/2011	7:29:01 PM	Main Vac valve closed
3/24/2011	7:29:01 PM	Bypass valve closed
3/24/2011	7:29:01 PM	H2 valve opened
3/24/2011	7:29:01 PM	Bubbler valve opened
3/24/2011	7:29:01 PM	Helium MFC set to  0.000000
3/24/2011	7:29:01 PM	H2 MFC set to  500.000000
3/24/2011	7:29:01 PM	BCl3 MFC set to  0.000000
3/24/2011	7:29:01 PM	PHl3 MFC set to  0.000000
3/24/2011	7:29:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	7:29:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	7:29:01 PM	Tube furnace set to 1000
3/24/2011	7:49:01 PM	Helium valve closed
3/24/2011	7:49:01 PM	PH3 valve closed
3/24/2011	7:49:01 PM	Main Vac valve closed
3/24/2011	7:49:01 PM	Bypass valve closed
3/24/2011	7:49:01 PM	H2 valve opened
3/24/2011	7:49:01 PM	BCl3 valve opened
3/24/2011	7:49:01 PM	SiCl4 pre valve opened
3/24/2011	7:49:01 PM	SiCl4 post valve opened
3/24/2011	7:49:01 PM	Bubbler valve opened
3/24/2011	7:49:01 PM	Helium MFC set to  0.000000
3/24/2011	7:49:01 PM	H2 MFC set to  500.000000
3/24/2011	7:49:01 PM	BCl3 MFC set to  3.000000
3/24/2011	7:49:01 PM	PHl3 MFC set to  0.000000
3/24/2011	7:49:01 PM	SiCl4 MFC set to  50.000000
3/24/2011	7:49:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	7:49:01 PM	Tube furnace set to 1000
3/24/2011	8:09:01 PM	H2 valve closed
3/24/2011	8:09:01 PM	BCl3 valve closed
3/24/2011	8:09:01 PM	PH3 valve closed
3/24/2011	8:09:01 PM	SiCl4 pre valve closed
3/24/2011	8:09:01 PM	SiCl4 post valve closed
3/24/2011	8:09:01 PM	Main Vac valve closed
3/24/2011	8:09:01 PM	Bypass valve closed
3/24/2011	8:09:01 PM	Helium valve opened
3/24/2011	8:09:01 PM	Bubbler valve opened
3/24/2011	8:09:01 PM	Helium MFC set to  500.000000
3/24/2011	8:09:01 PM	H2 MFC set to  0.000000
3/24/2011	8:09:01 PM	BCl3 MFC set to  0.000000
3/24/2011	8:09:01 PM	PHl3 MFC set to  0.000000
3/24/2011	8:09:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	8:09:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:09:01 PM	Tube furnace set to 0
3/24/2011	8:29:01 PM	Helium valve closed
3/24/2011	8:29:01 PM	H2 valve closed
3/24/2011	8:29:01 PM	BCl3 valve closed
3/24/2011	8:29:01 PM	PH3 valve closed
3/24/2011	8:29:01 PM	SiCl4 pre valve closed
3/24/2011	8:29:01 PM	SiCl4 post valve closed
3/24/2011	8:29:01 PM	Main Vac valve closed
3/24/2011	8:29:01 PM	Bypass valve closed
3/24/2011	8:29:01 PM	Bubbler valve closed
3/24/2011	8:29:01 PM	Helium MFC set to  0.000000
3/24/2011	8:29:01 PM	H2 MFC set to  0.000000
3/24/2011	8:29:01 PM	BCl3 MFC set to  0.000000
3/24/2011	8:29:01 PM	PHl3 MFC set to  0.000000
3/24/2011	8:29:01 PM	SiCl4 MFC set to  0.000000
3/24/2011	8:29:01 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	8:29:01 PM	Tube furnace set to 0
3/24/2011	8:29:02 PM	Run finished at 8:29 PM
3/24/2011	9:32:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/24/2011	9:32:53 PM	Recipe started at 9:32 PM
3/24/2011	9:32:53 PM	Helium valve closed
3/24/2011	9:32:53 PM	H2 valve closed
3/24/2011	9:32:53 PM	BCl3 valve closed
3/24/2011	9:32:53 PM	PH3 valve closed
3/24/2011	9:32:53 PM	SiCl4 pre valve closed
3/24/2011	9:32:53 PM	SiCl4 post valve closed
3/24/2011	9:32:53 PM	Main Vac valve closed
3/24/2011	9:32:53 PM	Bubbler valve closed
3/24/2011	9:32:53 PM	Bypass valve opened
3/24/2011	9:32:53 PM	Helium MFC set to  0.000000
3/24/2011	9:32:53 PM	H2 MFC set to  0.000000
3/24/2011	9:32:53 PM	BCl3 MFC set to  0.000000
3/24/2011	9:32:53 PM	PHl3 MFC set to  0.000000
3/24/2011	9:32:53 PM	SiCl4 MFC set to  0.000000
3/24/2011	9:32:53 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	9:32:54 PM	Tube furnace set to 0
3/24/2011	9:33:25 PM	Helium valve closed
3/24/2011	9:33:25 PM	H2 valve closed
3/24/2011	9:33:25 PM	BCl3 valve closed
3/24/2011	9:33:25 PM	PH3 valve closed
3/24/2011	9:33:25 PM	SiCl4 pre valve closed
3/24/2011	9:33:25 PM	SiCl4 post valve closed
3/24/2011	9:33:25 PM	Bubbler valve closed
3/24/2011	9:33:25 PM	Main Vac valve opened
3/24/2011	9:33:25 PM	Bypass valve opened
3/24/2011	9:33:25 PM	Helium MFC set to  0.000000
3/24/2011	9:33:25 PM	H2 MFC set to  0.000000
3/24/2011	9:33:25 PM	BCl3 MFC set to  0.000000
3/24/2011	9:33:25 PM	PHl3 MFC set to  0.000000
3/24/2011	9:33:25 PM	SiCl4 MFC set to  0.000000
3/24/2011	9:33:25 PM	Bypass solenoid MFC set to  0.000000
3/24/2011	9:33:25 PM	Tube furnace set to 0
3/24/2011	9:33:26 PM	Run finished at 9:33 PM
3/24/2011	9:33:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
